A time-varying Q-filter design for iterative learning control with application to an ultra-precision dual-stage actuated wafer stage
2014 ◽
Vol 228
(9)
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pp. 658-667
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2003 ◽
Vol 9
(4)
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pp. 277-283
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2020 ◽
Vol 67
(10)
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pp. 8629-8637
2014 ◽
Vol 22
(4)
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pp. 1350-1361
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