Mechanical Characterization of Thin Film Materials for MEMS Devices

2006 ◽  
pp. 35-63
Author(s):  
Jun Lou
Keyword(s):  
Thin Film ◽  
Mechanical Characterization ◽  
Mems Devices

Mechanical characterization of optical glass fiber coated with a thin film of silver nanoparticles by nanoindentation

2014 ◽  
Vol 136 ◽  
pp. 63-66 ◽  
Author(s):  
A. Nevarez-Rascon ◽  
E. Orrantia-Borunda ◽  
J. González-Hernández ◽  
S. Flores-Gallardo ◽  
A. Hurtado-Macías
Keyword(s):  
Thin Film ◽  
Silver Nanoparticles ◽  
Glass Fiber ◽  
Mechanical Characterization ◽  
Optical Glass ◽  
Optical Glass Fiber

A static technique for the electro-mechanical characterization of MEMS devices for RF and microwave applications

2002 ◽  
Vol 729 ◽  
Author(s):  
Anupama B. Kaul ◽  
Tomasz Klosowiak ◽  
Joshua Liu
Keyword(s):  
Visual Inspection ◽  
Mechanical Characterization ◽  
Electrostatic Force ◽  
Effective Elastic Modulus ◽  
Inspection System ◽  
Mems Devices ◽  
Microwave Frequencies ◽  
Microwave Applications ◽  
Measuring Force

AbstractAn approach for measuring force-dependent properties of microscopic structures commonly found in MEMS has been developed. The system has the capability of measuring forces and deflections of the order of micro-newtons and micro-meters, respectively. By implementing a visual inspection system, force is applied to localized areas on a beam, and the resulting force-deflection characteristic can be obtained. From this beam stiffness and effective elastic modulus can be calculated. These results were compared to simulation, which was performed using ANSYS FEM code. In addition, by applying a known mechanical force, direct correlation to voltage and thus electrostatic force can be obtained, which also elucidates the magnitude of the electrostatic feedback effect. Characterization of other force-dependent parameters such as DC contact resistance and isolation/insertion loss at RF and microwave frequencies was obtained experimentally, from which parameters such as lumped capacitance can be extracted.

Structural and mechanical characterization of Al/Al2O3 nanotube thin film on TiV alloy

2014 ◽  
Vol 321 ◽  
pp. 511-519 ◽  
Author(s):  
M. Sarraf ◽  
E. Zalnezhad ◽  
A.R. Bushroa ◽  
A.M.S. Hamouda ◽  
S. Baradaran ◽  
...  
Keyword(s):  
Thin Film ◽  
Mechanical Characterization

scholarly journals AFM Nanotribomechanical Characterization of Thin Films for MEMS Applications

Micromachines ◽  
2021 ◽  
Vol 13 (1) ◽  
pp. 23
Author(s):  
Corina Bîrleanu ◽  
Marius Pustan ◽  
Florina Șerdean ◽  
Violeta Merie
Keyword(s):  
Thin Film ◽  
Thin Films ◽  
Microelectromechanical Systems ◽  
Mems Devices ◽  
Force Microscopy ◽  
Atomic Force ◽  
Fundamental Understanding ◽  
Quantitative Analyses ◽  
Efficiency And Reliability

Nanotribological studies of thin films are needed to develop a fundamental understanding of the phenomena that occur to the interface surfaces that come in contact at the micro and nanoscale and to study the interfacial phenomena that occur in microelectromechanical systems (MEMS/NEMS) and other applications. Atomic force microscopy (AFM) has been shown to be an instrument capable of investigating the nanomechanical behavior of many surfaces, including thin films. The measurements of tribo-mechanical behavior for MEMS materials are essential when it comes to designing and evaluating MEMS devices. A great deal of research has been conducted to evaluate the efficiency and reliability of different measurements methods for mechanical properties of MEMS material; nevertheless, the technologies regarding manufacturing and testing MEMS materials are not fully developed. The objectivesof this study are to focus on the review of the mechanical and tribological advantages of thin film and to highlight the experimental results of some thin films to obtain quantitative analyses, the elastic/plastic response and the nanotribological behavior. The slight fluctuation of the results for common thin-film materials is most likely due to the lack of international standardization for MEMS materials and for the methods used to measure their properties.

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