Study of Plasma Induced Gas Phase Growth Mechanism of TiO2/Al2O3 Multilayer Thin Films and Its Correlation with its Morphological and Electrical Properties

2014 ◽  
pp. 221-240 ◽  
2021 ◽  
Vol 8 ◽  
Author(s):  
Jinyu Ruan ◽  
Chao Yin ◽  
Tiandong Zhang ◽  
Hao Pan

Ferroelectric multilayer films attract great attention for a wide variation of applications. The synergistic effect by combining different functional layers induces distinctive electrical properties. In this study, ferroelectric BaZr0.2Ti0.8O3/PbZr0.52Ti0.48O3/BaZr0.2Ti0.8O3 (BZT/PZT/BZT) multilayer thin films are designed and fabricated by using the magnetron sputtering method, and a LaNiO3 (LNO) seed layer is introduced. The microstructures and electrical properties of the BZT/PZT/BZT films with and without the LNO seed layer are systematically studied. The results show that the BZT/PZT/BZT/LNO thin film exhibits much lower surface roughness and a preferred (100)-orientation growth, with the growth template and tensile stress provided by the LNO layer. Moreover, an enhanced dielectric constant, decreased dielectric loss, and improved ferroelectric properties are achieved in BZT/PZT/BZT/LNO thin films. This work reveals that the seed layer can play an important role in improving the microstructure and properties of ferroelectric multilayer films.


2000 ◽  
Vol 62 (14) ◽  
pp. 9566-9574 ◽  
Author(s):  
P. J. Grundy ◽  
J. M. Fallon ◽  
H. J. Blythe

2016 ◽  
Vol 08 (05) ◽  
pp. 80-82
Author(s):  
Md. Sarwar Pervez ◽  
M. A. I Nahid ◽  
Md. Faruk Hossain

2020 ◽  
Vol 12 (7) ◽  
pp. 890-900
Author(s):  
Hua Wei ◽  
Hua Zhang ◽  
Yang Zhou ◽  
Zongbao Wang ◽  
Rong Wang ◽  
...  

This study demonstrated the feasibility of polymer brushes-modified plate substrate as template to construct multilayer thin films via layer-by-layer hydrogen bonded assembly. The anchored chains via controlled surface-initiated atom transfer radical polymerization (SI-ATRP). The anchored poly(4-vinylpyridine) brushes functions as a multivalent H-acceptor to regulate the following hydrogen bonded assembly with H-donors to construct multilayer thin films via layer-by-layer deposition technique. The growth mechanism and film natures of multilayer films mediated by hydrogen bonded assembly from a polymer brushes-grafted surface were fully investigated.


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