High-resolution three-degrees-of-freedom motion errors measuring system for a single-axis linear moving platform
2008 ◽
Vol 223
(1)
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pp. 107-114
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Keyword(s):
2009 ◽
Vol 224
(8)
◽
pp. 1717-1726
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2013 ◽
Vol 284-287
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pp. 1951-1955
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2009 ◽
Vol 224
(1)
◽
pp. 37-50
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2015 ◽
Vol 230
(3)
◽
pp. 392-405
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2010 ◽
Vol 37-38
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pp. 73-76
2018 ◽
Vol 1
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pp. 133-142
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