S055032 Ion energy distributions at the substrate in low pressure inductively coupled plasmas
2012 ◽
Vol 2012
(0)
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pp. _S055032-1-_S055032-3
2012 ◽
Vol 21
(6)
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pp. 065009
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2013 ◽
Vol 22
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pp. 065008
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2010 ◽
Vol 19
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pp. 065001
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2003 ◽
Vol 21
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pp. 1988-1992
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2015 ◽
Vol 24
(3)
◽
pp. 034017
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