Modeling and Diagnostics of Low Pressure Inductively Coupled Plasmas

Electron Kinetics and Applications of Glow Discharges - NATO Science Series: B ◽

10.1007/0-306-47076-4_20 ◽

2006 ◽

pp. 329-347

Author(s):

Uwe Kortshagen

Keyword(s):

Low Pressure ◽

Inductively Coupled Plasmas ◽

Inductively Coupled ◽

Coupled Plasmas

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Modelling of electron kinetics in low-pressure inductively coupled plasmas

International Conference on Plasma Science (papers in summary form only received) ◽

10.1109/plasma.1995.531593 ◽

1995 ◽

Author(s):

V.I. Kolobov ◽

G.J. Parker ◽

W.N.G. Hitchon

Keyword(s):

Low Pressure ◽

Inductively Coupled Plasmas ◽

Electron Kinetics ◽

Inductively Coupled ◽

Coupled Plasmas

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Controlling VUV photon fluxes in low-pressure inductively coupled plasmas

Plasma Sources Science and Technology ◽

10.1088/0963-0252/24/3/034017 ◽

2015 ◽

Vol 24 (3) ◽

pp. 034017 ◽

Author(s):

Peng Tian ◽

Mark J Kushner

Keyword(s):

Low Pressure ◽

Inductively Coupled Plasmas ◽

Inductively Coupled ◽

Coupled Plasmas

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Lorentz force effect on electron energy distribution in low pressure inductively coupled plasmas

IEEE Conference Record - Abstracts. PPPS-2001 Pulsed Power Plasma Science 2001. 28th IEEE International Conference on Plasma Science and 13th IEEE International Pulsed Power Conference (Cat. No.01CH37255) ◽

10.1109/ppps.2001.961052 ◽

2002 ◽

Author(s):

V.I. Kolobov ◽

V.A. Godyak

Keyword(s):

Energy Distribution ◽

Electron Energy ◽

Lorentz Force ◽

Low Pressure ◽

Electron Energy Distribution ◽

Inductively Coupled Plasmas ◽

Force Effect ◽

Inductively Coupled ◽

Coupled Plasmas

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Study of Low Pressure Inductively Coupled Plasmas: Effects of the DC Bias and Gas Flow Rate

Japanese Journal of Applied Physics ◽

10.7567/jjap.52.05ea03 ◽

2013 ◽

Vol 52 (5S2) ◽

pp. 05EA03 ◽

Author(s):

Lizhu Tong

Keyword(s):

Flow Rate ◽

Gas Flow ◽

Low Pressure ◽

Inductively Coupled Plasmas ◽

Gas Flow Rate ◽

Inductively Coupled ◽

Dc Bias ◽

Coupled Plasmas

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Fundamental study on filter effect of confronting divergent magnetic fields applied to low-pressure inductively coupled plasmas

Japanese Journal of Applied Physics ◽

10.7567/jjap.55.07ld05 ◽

2016 ◽

Vol 55 (7S2) ◽

pp. 07LD05 ◽

Author(s):

Hirotake Sugawara ◽

So Ogino

Keyword(s):

Magnetic Fields ◽

Low Pressure ◽

Inductively Coupled Plasmas ◽

Fundamental Study ◽

Inductively Coupled ◽

Filter Effect ◽

Coupled Plasmas

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A hybrid model for low pressure inductively coupled plasmas combining a fluid model for electrons with a plasma-potential-dependent energy distribution and a fluid-Monte Carlo model for ions

Plasma Sources Science and Technology ◽

10.1088/0963-0252/25/2/025007 ◽

2016 ◽

Vol 25 (2) ◽

pp. 025007 ◽

Author(s):

S Mouchtouris ◽

G Kokkoris

Keyword(s):

Monte Carlo ◽

Energy Distribution ◽

Hybrid Model ◽

Fluid Model ◽

Monte Carlo Model ◽

Low Pressure ◽

Plasma Potential ◽

Inductively Coupled Plasmas ◽

Inductively Coupled ◽

Coupled Plasmas

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On the validity of neutral gas temperature by N2rovibrational spectroscopy in low-pressure inductively coupled plasmas

Plasma Sources Science and Technology ◽

10.1088/0963-0252/20/3/035016 ◽

2011 ◽

Vol 20 (3) ◽

pp. 035016 ◽

Author(s):

J-S Poirier ◽

P-M Bérubé ◽

J Muñoz ◽

J Margot ◽

L Stafford ◽

...

Keyword(s):

Low Pressure ◽

Gas Temperature ◽

Inductively Coupled Plasmas ◽

Inductively Coupled ◽

Neutral Gas ◽

Coupled Plasmas

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Low-Pressure Inductively Coupled Plasmas

Glow Discharge Plasmas in Analytical Spectroscopy ◽

10.1002/0470857854.ch16 ◽

2003 ◽

pp. 401-433

Author(s):

E. H. Evans

Keyword(s):

Low Pressure ◽

Inductively Coupled Plasmas ◽

Inductively Coupled ◽

Coupled Plasmas

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Highly vibrationally excited O2molecules in low-pressure inductively-coupled plasmas detected by high sensitivity ultra-broad-band optical absorption spectroscopy

Plasma Sources Science and Technology ◽

10.1088/0963-0252/24/4/042001 ◽

2015 ◽

Vol 24 (4) ◽

pp. 042001 ◽

Author(s):

Mickaël Foucher ◽

Daniil Marinov ◽

Emile Carbone ◽

Pascal Chabert ◽

Jean-Paul Booth

Keyword(s):

Optical Absorption ◽

Absorption Spectroscopy ◽

High Sensitivity ◽

Low Pressure ◽

Optical Absorption Spectroscopy ◽

Inductively Coupled Plasmas ◽

Vibrationally Excited ◽

Inductively Coupled ◽

Coupled Plasmas

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Temperature-Dependent Properties of nc-Si Thin Films Synthesized in Low-Pressure, Thermally Nonequilibrium, High-Density Inductively Coupled Plasmas

The Journal of Physical Chemistry C ◽

10.1021/jp9047083 ◽

2009 ◽

Vol 113 (33) ◽

pp. 14759-14764 ◽

Author(s):

Qijin Cheng ◽

Shuyan Xu ◽

Kostya (Ken) Ostrikov

Keyword(s):

Low Pressure ◽

High Density ◽

Inductively Coupled Plasmas ◽

Temperature Dependent ◽

Inductively Coupled ◽

Temperature Dependent Properties ◽

Coupled Plasmas

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