Collisional effect on the time evolution of ion energy distributions outside the sheath during the afterglow of pulsed inductively coupled plasmas

2013 ◽  
Vol 22 (6) ◽  
pp. 065008 ◽  
Author(s):  
J B Lee ◽  
H Y Chang ◽  
S H Seo
Keyword(s):  
Time Evolution ◽  
Inductively Coupled Plasmas ◽  
Energy Distributions ◽  
Ion Energy ◽  
Inductively Coupled ◽  
Collisional Effect ◽  
Ion Energy Distributions ◽  
Coupled Plasmas

scholarly journals Ion energy distributions in inductively coupled plasmas having a biased boundary electrode

2012 ◽  
Vol 21 (6) ◽  
pp. 065009 ◽  
Author(s):  
Michael D Logue ◽  
Hyungjoo Shin ◽  
Weiye Zhu ◽  
Lin Xu ◽  
Vincent M Donnelly ◽  
...  
Keyword(s):  
Inductively Coupled Plasmas ◽  
Energy Distributions ◽  
Ion Energy ◽  
Inductively Coupled ◽  
Ion Energy Distributions ◽  
Coupled Plasmas

Decreasing high ion energy during transition in pulsed inductively coupled plasmas

2012 ◽  
Vol 100 (4) ◽  
pp. 044105 ◽  
Author(s):  
Ankur Agarwal ◽  
Phillip J. Stout ◽  
Samer Banna ◽  
Shahid Rauf ◽  
Ken Collins
Keyword(s):  
Inductively Coupled Plasmas ◽  
Ion Energy ◽  
Inductively Coupled ◽  
Coupled Plasmas
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