scholarly journals Obtaining the center of gravity, inertia parameters and finite element approximation models of electromagnetic nonlinearity on 6DOF magnetic levitation system by adaptive control method

2015 ◽  
Vol 81 (824) ◽  
pp. 14-00496-14-00496
Author(s):  
Takashi ANDO
Keyword(s):  
Finite Element ◽  
Adaptive Control ◽  
Control Method ◽  
Magnetic Levitation ◽  
Finite Element Approximation ◽  
Center Of Gravity ◽  
Element Approximation ◽  
Levitation System ◽  
Inertia Parameters ◽  
Magnetic Levitation System

scholarly journals Movement Control Method of Magnetic Levitation System Using Eccentricity of Non-Contact Position Sensor

2021 ◽  
Vol 11 (5) ◽  
pp. 2396
Author(s):  
Jong Suk Lim ◽  
Hyung-Woo Lee
Keyword(s):  
Motor System ◽  
Control Method ◽  
Magnetic Levitation ◽  
Movement Control ◽  
Position Sensor ◽  
Semiconductor Wafer ◽  
Control Command ◽  
Levitation System ◽  
Magnetic Levitation System ◽  
Contact Position

This paper presents a method of utilizing a non-contact position sensor for the tilting and movement control of a rotor in a rotary magnetic levitation motor system. This system has been studied with the aim of having a relatively simple and highly clean alternative application compared to the spin coater used in the photoresist coating process in the semiconductor wafer process. To eliminate system wear and dust problems, a shaft-and-bearing-free magnetic levitation motor system was designed and a minimal non-contact position sensor was placed. An algorithm capable of preventing derailment and precise movement control by applying only control without additional mechanical devices to this magnetic levitation system was proposed. The proposed algorithm was verified through simulations and experiments, and the validity of the algorithm was verified by deriving a precision control result suitable for the movement control command in units of 0.1 mm at 50 rpm rotation drive.

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