A highly efficient and mild procedure for the trimethylsilylation of a wide variety of alcohols, including primary, benzylic, secondary, hindered secondary, tertiary, phenols, and oximes with hexamethyldisilazane (HMDS), using Al(H2PO4)3 as a recyclable heterogeneous catalyst at room temperature in a few minutes with excellent yields under solvent-free conditions is described.Key words: trimethylsilylation, hexamethyldisilazane, aluminum tris(dihydrogen phosphate) [Al(H2PO4)3], solvent-free, hydroxyl groups.