Reflectance measurements and optical constants in the extreme ultraviolet for thin films of ion-beam-deposited SiC, Mo, Mg_2Si, and InSb and of evaporated Cr

2000 ◽  
Vol 39 (16) ◽  
pp. 2772 ◽  
Author(s):  
Juan I. Larruquert ◽  
Ritva A. M. Keski-Kuha
Keyword(s):  
Thin Films ◽  
Optical Constants ◽  
Extreme Ultraviolet ◽  
Ion Beam ◽  
Reflectance Measurements

Extreme ultraviolet optical properties of ion-beam-deposited boron carbide thin films

1995 ◽  
Author(s):  
Gerry M. Blumenstock ◽  
Ritva A. M. Keski-Kuha ◽  
Marshal L. Ginter
Keyword(s):  
Thin Films ◽  
Optical Properties ◽  
Boron Carbide ◽  
Extreme Ultraviolet ◽  
Ion Beam

Simultaneous determination of the optical constants and thickness of very thin films by using soft-x-ray reflectance measurements

1994 ◽  
Vol 33 (10) ◽  
pp. 2013 ◽  
Author(s):  
Jianlin Cao ◽  
Mihiro Yanagihara ◽  
Masaki Yamamoto ◽  
Yoshinori Goto ◽  
Takeshi Namioka
Keyword(s):  
Thin Films ◽  
Simultaneous Determination ◽  
Optical Constants ◽  
X Ray ◽  
Reflectance Measurements

Reflectance measurements and optical constants in the extreme ultraviolet-vacuum ultraviolet regions for SiC with a different C/Si ratio

2006 ◽  
Vol 45 (22) ◽  
pp. 5642 ◽  
Author(s):  
Denis Garoli ◽  
F. Frassetto ◽  
G. Monaco ◽  
P. Nicolosi ◽  
M.-G. Pelizzo ◽  
...  
Keyword(s):  
Optical Constants ◽  
Vacuum Ultraviolet ◽  
Extreme Ultraviolet ◽  
Reflectance Measurements

VUV reflectance measurements and optical constants of SiC thin films

2005 ◽  
Vol 144-147 ◽  
pp. 987-992 ◽  
Author(s):  
P. Nicolosi ◽  
D. Garoli ◽  
M.-G. Pelizzo ◽  
V. Rigato ◽  
A. Patelli ◽  
...  
Keyword(s):  
Thin Films ◽  
Optical Constants ◽  
Reflectance Measurements
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