Partially Coherent Quantitative Phase Retrieval for EUV Lithography

Author(s):  
Rene Claus ◽  
Yow-Gwo Wang ◽  
Markus Benk ◽  
Kenneth A. Goldberg ◽  
Patrick Naulleau ◽  
...  
Fringe 2013 ◽  
2014 ◽  
pp. 283-287
Author(s):  
Mostafa Agour ◽  
Khaled Elshaffey ◽  
Christoph von Kopylow ◽  
Ralf B. Bergmann ◽  
Claas Falldorf

2018 ◽  
Vol 8 (11) ◽  
pp. 2147 ◽  
Author(s):  
Daniel Claus ◽  
Jörg Hennenlotter ◽  
Qi Liting ◽  
Giancarlo Pedrini ◽  
Arnulf Stenzl ◽  
...  

Quantitative phase imaging can reveal morphological features without having to stain the biological sample. This property has important implications for intraoperative applications since the time spent during histopathology can be reduced from a few minutes to a few seconds. However, most common quantitative phase imaging techniques are based on the interferometric principle, which makes them more prone to disturbing environmental influences, such as temperature drift and air turbulence. In the last decade, with the advance of computing power, many different iterative quantitative phase imaging techniques, which only require the recording of the diffracted wavefield, and therefore offer increased robustness towards environmental disturbances, have been proposed. These are particularly well-suited for the application outside the well-controlled lab environment such as an operating theatre. The optical performance of our developed iterative phase retrieval method based on variable wavefront curvature will be evaluated by reference to off-axis digital holography and applied for intraoperative discrimination of tissue.


Author(s):  
Meiling Zhou ◽  
Junwei Min ◽  
Peng Gao ◽  
Yansheng Liang ◽  
Ming Lei ◽  
...  

2016 ◽  
Vol 40 (2) ◽  
pp. 029001
Author(s):  
Heng Chen ◽  
Kun Gao ◽  
Da-Jiang Wang ◽  
Li Song ◽  
Zhi-Li Wang

2013 ◽  
Vol 15 (7) ◽  
pp. 075712 ◽  
Author(s):  
I-Lin Ho ◽  
Ming-Yaw Ng ◽  
Kai-Chuan Chen ◽  
Wang-Yang Li ◽  
Yia-Chung Chang

Author(s):  
Stuart Sherwin ◽  
Isvar A. Cordova ◽  
Ryan Miyakawa ◽  
Laura Waller ◽  
Andrew Neureuther ◽  
...  

2021 ◽  
Vol 139 ◽  
pp. 106407 ◽  
Author(s):  
Mostafa Agour ◽  
Claas Falldorf ◽  
Fabian Thiemicke ◽  
Ralf B. Bergmann

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