Application of image spectrometer to in situ infrared broadband optical monitoring for thin film deposition
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2004 ◽
Vol 10
(S02)
◽
pp. 1118-1119
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2000 ◽
Vol 147
(5)
◽
pp. 1803
◽
1994 ◽
Vol 41
(5)
◽
pp. 703-708
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