In situ ellipsometric diagnostics of multilayer thin film deposition during sputtering

1998 ◽  
Vol 313-314 ◽  
pp. 511-515 ◽  
Author(s):  
Xiang Gao ◽  
Darin W Glenn ◽  
John A Woollam
Keyword(s):  
Thin Film ◽  
Thin Film Deposition ◽  
Film Deposition ◽  
Multilayer Thin Film

scholarly journals Measurements Of Stress Evolution During Thin Film Deposition

1996 ◽  
Vol 428 ◽  
Author(s):  
E. Chason ◽  
J. A. Floro
Keyword(s):  
Thin Film ◽  
Thin Film Deposition ◽  
Film Deposition ◽  
Film Stress ◽  
Radius Of Curvature ◽  
Stress Evolution ◽  
Rectangular Array ◽  
Thin Film Stress ◽  
Ccd Detector

AbstractWe have developed a technique for measuring thin film stress during growth by monitoring the wafer curvature. By measuring the deflection of multiple parallel laser beams with a CCD detector, the sensitivity to vibration is reduced and a radius of curvature limit of 4 km has been obtained in situ. This technique also enables us to obtain a 2-dimensional profile of the surface curvature from the simultaneous reflection of a rectangular array of beams. Results from the growth of SiGe alloy films are presented to demonstrate the unique information that can be obtained during growth.

Nanoscale Holes Formed by In Situ Thin Film Deposition in a FIB

2004 ◽  
Vol 10 (S02) ◽  
pp. 1118-1119 ◽  
Author(s):  
Andrew M Minor ◽  
Francis Allen ◽  
Velimir R Radmilovic ◽  
Eric A Stach ◽  
Thomas Schenkel
Keyword(s):  
Thin Film ◽  
Thin Film Deposition ◽  
Film Deposition

Extended abstract of a paper presented at Microscopy and Microanalysis 2004 in Savannah, Georgia, USA, August 1–5, 2004.

scholarly journals Application of image spectrometer to in situ infrared broadband optical monitoring for thin film deposition

2011 ◽  
Vol 19 (14) ◽  
pp. 12969 ◽  
Author(s):  
Qing-Yuan Cai ◽  
Yu-Xiang Zheng ◽  
Dong-Xu Zhang ◽  
Wei-Jie Lu ◽  
Rong-Jun Zhang ◽  
...  
Keyword(s):  
Thin Film ◽  
Thin Film Deposition ◽  
Film Deposition ◽  
Optical Monitoring ◽  
Image Spectrometer

In and out-diffusion of oxygen during YBa2Cu3O7−δ thin film deposition by in situ resistance measurement

1992 ◽  
Author(s):  
J. P. Zheng ◽  
D. H. Kim ◽  
S. Y. Dong ◽  
C. Lehane ◽  
W. P. Shen ◽  
...  
Keyword(s):  
Thin Film ◽  
Thin Film Deposition ◽  
Film Deposition ◽  
Resistance Measurement
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