Diffuse reflectivity measurement using cubic cavity

2014 ◽  
Vol 39 (7) ◽  
pp. 1941 ◽  
Author(s):  
Jia Yu ◽  
Y. G. Zhang ◽  
Qiang Gao ◽  
Gang Hu ◽  
Z. G. Zhang ◽  
...  
2013 ◽  
Vol 24 (10) ◽  
pp. 105102 ◽  
Author(s):  
Zhihui Luo ◽  
Hongqiao Wen ◽  
Xiaofu Li ◽  
Huiyong Guo

2015 ◽  
Vol 4 (4) ◽  
Author(s):  
Hiroo Kinoshita ◽  
Takeo Watanabe ◽  
Tetsuo Harada

AbstractThirty years have passed since the first report on extreme ultraviolet lithography (EUVL) was presented at the annual meeting of the Japanese Society of Applied Physics in 1986. This technology is now in the manufacturing development stage. The high-volume manufacturing of dynamic-random-access-memory (DRAM) chips with a line width of 15 nm is expected in 2016. However, there are critical development issues that remain: generating a stand-alone EUV source with a higher power and producing a mask inspection tool for obtaining zero-defect masks. The Center for EUVL at the University of Hyogo was established in 2010. At present, it utilizes various types of equipment, such as an EUV mask defect inspection tool, an interference-lithography system, a device for measuring the thickness of carbon contamination film deposited by resist outgassing, and reflectivity measurement systems.


2015 ◽  
Vol 29 (4) ◽  
pp. 1028-1040 ◽  
Author(s):  
Vahid Balali ◽  
Mohammad Amin Sadeghi ◽  
Mani Golparvar-Fard

2012 ◽  
Vol 06 ◽  
pp. 215-220 ◽  
Author(s):  
KAORU SHINNOU ◽  
HIRONORI FUJITO ◽  
TOMOOKI KAWASAKI ◽  
HIDEHITO ANDO ◽  
MAIKO MITO ◽  
...  

Diffuse reflectivity in the longer wavelength region after the absorption edge was studied on the LaTiO 2 N nitrided. It was discussed in the viewpoint of particle sizes by use of ball milling and bead milling technique. The diffuse reflectivity after absorption edge of the LaTiO 2 N powders got lower in accordance with the reduction of particle sizes. In case of LaTiO 2 N aqueous suspension after the bead-milling treatment in which the primary particles were well dispersed, remarkable enhancement of the diffuse reflectivity was observed with decreasing the average particle sizes.


2009 ◽  
Vol 167 (1) ◽  
pp. 101-105 ◽  
Author(s):  
Y. F. Yano ◽  
T. Uruga ◽  
H. Tanida ◽  
H. Toyokawa ◽  
Y. Terada ◽  
...  

2008 ◽  
Vol 113 ◽  
pp. 012039 ◽  
Author(s):  
S Balabanov ◽  
T Tsvetkova ◽  
E Borisova ◽  
L Avramov ◽  
L Bischoff

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