scholarly journals Computer simulation of sputtering of graphite target in magnetron sputtering device with two zones of erosion

2015 ◽  
Vol 33 (1) ◽  
pp. 82-94
Author(s):  
R.V. Bogdanov ◽  
O.M. Kostiukevych
Keyword(s):  
Carbon Nanotubes ◽  
Computer Simulation ◽  
Monte Carlo ◽  
Magnetron Sputtering ◽  
Energy Flux ◽  
Discharge Current ◽  
Carbon Films ◽  
Monte Carlo Code ◽  
Graphite Target ◽  
Computer Simulation Program

AbstractA computer simulation program for discharge in a magnetron sputtering device with two erosion zones was developed. Basic laws of the graphite target sputtering process and transport of sputtered material to the substrate were taken into account in the Monte Carlo code. The results of computer simulation for radial distributions of density and energy flux of carbon atoms on the substrate (at different values of discharge current and pressure of the working gas) confirmed the possibility of obtaining qualitative homogeneous films using this magnetron sputtering device. Also the discharge modes were determined for this magnetron sputtering device, in which it was possible to obtain such energy and density of carbon atoms fluxes, which were suitable for deposition of carbon films containing carbon nanotubes and other nanoparticles.

Diamond like carbon films deposited from graphite target by asymmetric bipolar pulsed-DC magnetron sputtering

2007 ◽  
Vol 16 (4-7) ◽  
pp. 1286-1290 ◽  
Author(s):  
M. Rubio-Roy ◽  
C. Corbella ◽  
J. Garcia-Céspedes ◽  
M.C. Polo ◽  
E. Pascual ◽  
...  
Keyword(s):  
Magnetron Sputtering ◽  
Carbon Films ◽  
Diamond Like Carbon ◽  
Dc Magnetron Sputtering ◽  
Graphite Target ◽  
Pulsed Dc ◽  
Pulsed Dc Magnetron Sputtering

Synthesis of carbon films by magnetron sputtering of a graphite target using hydrogen as plasma-forming gas

2011 ◽  
Vol 38 (9) ◽  
pp. 263-266 ◽  
Author(s):  
A. N. Yurkov ◽  
N. N. Melnik ◽  
V. V. Sychev ◽  
V. V. Savranskii ◽  
D. V. Vlasov ◽  
...  
Keyword(s):  
Magnetron Sputtering ◽  
Carbon Films ◽  
Graphite Target

Usage of burnt fuel isotopic compositions from engineering codes in Monte-Carlo code calculations

Kerntechnik ◽  
2015 ◽  
Vol 80 (4) ◽  
pp. 394-401 ◽  
Author(s):  
S. S. Aleshin ◽  
S. S. Gorodkov ◽  
A. I. Shcherenko
Keyword(s):  
Monte Carlo ◽  
Monte Carlo Code ◽  
Isotopic Compositions

scholarly journals FRED: a fast Monte Carlo code on GPU for quality control in Particle Therapy

2020 ◽  
Vol 1548 ◽  
pp. 012020
Author(s):  
M De Simoni ◽  
M Fischetti ◽  
E Gioscio ◽  
M Marafini ◽  
R Mirabelli ◽  
...  
Keyword(s):  
Quality Control ◽  
Monte Carlo ◽  
Particle Therapy ◽  
Monte Carlo Code

Improvement of sensitivity and uncertainty analysis capabilities of generalized response in Monte Carlo code RMC

2021 ◽  
Vol 154 ◽  
pp. 108099
Author(s):  
Guanlin Shi ◽  
Yuchuan Guo ◽  
Conglong Jia ◽  
Zhiyuan Feng ◽  
Kan Wang ◽  
...  
Keyword(s):  
Monte Carlo ◽  
Uncertainty Analysis ◽  
Monte Carlo Code ◽  
Sensitivity And Uncertainty Analysis

scholarly journals Delayed Discharge Bridging Two Sputtering Modes from Modulated Pulsed Power Magnetron Sputtering (MPPMS) to Deep Oscillation Magnetron Sputtering (DOMS)

Plasma ◽  
2021 ◽  
Vol 4 (2) ◽  
pp. 239-251
Author(s):  
Masaomi Sanekata ◽  
Hiroshi Nishida ◽  
Tatsuya Watabe ◽  
Yuki Nakagomi ◽  
Yoshihiro Hirai ◽  
...  
Keyword(s):  
Magnetron Sputtering ◽  
Discharge Current ◽  
Electrical Breakdown ◽  
Pulsed Power ◽  
Current Waveform ◽  
Delayed Discharge ◽  
Plot Analysis ◽  
Delay Times ◽  
Discharge Behavior ◽  
Delayed Discharges

Delayed discharges due to electrical breakdown are observed in modulated pulsed pow er magnetron sputtering (MPPMS) plasma of titanium. The delayed discharge, which is remarkable with decreasing argon gas pressure, transforms the discharge current waveform from a standard modulated pulsed discharge current waveform to a comb-like discharge current waveform consisting of several pulses with high power. In addition, the delay times, consisting of statistical times and formative times in the delayed MPPMS discharges, are experimentally measured with the help of Laue plot analysis. The pressure dependence of delay times observed indicates that the delayed discharge behavior matches the breakdown characteristics well. In the present study, the delayed discharge dynamics of the comb-like discharge current waveform, which can be the origin of deep oscillation magnetron sputtering, are investigated based on measurement of the delay times and the characteristics of discharge current waveforms.

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