Stainless Steel Plug Valve Incident in High Pressure Oxygen: Delrin®Seat and Silicone-Based Lubricant

Author(s):  
Jared D. Hooser ◽  
Bradley S. Forsyth ◽  
Gwenael J. A. Chiffoleau ◽  
Barry E. Newton
1991 ◽  
Vol 27 (3) ◽  
pp. 263-266 ◽  
Author(s):  
V. I. Bolobov ◽  
A. Yu. Berezin ◽  
P. F. Drozhzhin ◽  
A. S. Shteinberg

Author(s):  
Brian Drouin ◽  
Jiajun Hoo ◽  
V. Devi ◽  
D. Benner ◽  
David Robichaud ◽  
...  

2001 ◽  
Author(s):  
B. Vyskubenko ◽  
A. Adamenkov ◽  
S. Ilyin ◽  
Yu. Kolobyanin ◽  
I. Krukovsky ◽  
...  

2010 ◽  
Vol 447-448 ◽  
pp. 61-65 ◽  
Author(s):  
Kei Kitamura ◽  
Toshiro K. Doi ◽  
Syuhei Kurokawa ◽  
Yoji Umezaki ◽  
Yoji Matsukawa ◽  
...  

We designed and manufactured a prototype of a unique CMP machine, which can perform double-side CMP simultaneously in a sealed and pressure container as regarding effective action of the processing atmosphere around workpieces as important. Polishing experiments with single crystal silicon (Si) wafers (100) are performed by charging the container with various gases. As a result, the removal rates increased by up to 25% under high pressure oxygen gas atmosphere.


1992 ◽  
Vol 89 (2) ◽  
pp. 221-228 ◽  
Author(s):  
Theodore A. Steinberg ◽  
George P. Mulholland ◽  
D.Bruce Wilson ◽  
Frank J. Benz

2021 ◽  
Author(s):  
Hyungwoo Kim ◽  
Alireza Kashir ◽  
Seungyeol Oh ◽  
Hojung Jang ◽  
Hyunsang Hwang

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