New Applications of Electron Probe Microanalysis

1982 ◽

Vol 40 ◽

pp. 402-403 ◽

Cited By ~ 1

Author(s):

Claude Lechene

Keyword(s):

Liquid Nitrogen ◽

Electron Probe Microanalysis ◽

Electron Probe ◽

Cultured Cells ◽

Liquid Nitrogen Temperature ◽

Elemental Content ◽

Isolated Cells ◽

Renal Tubular Cells ◽

Diamond Saw ◽

Saw Blade

Electron probe microanalysis of frozen hydrated kidneysThe goal of the method is to measure on the same preparation the chemical elemental content of the renal luminal tubular fluid and of the surrounding renal tubular cells. The following method has been developed. Rat kidneys are quenched in solid nitrogen. They are trimmed under liquid nitrogen and mounted in a copper holder using a conductive medium. Under liquid nitrogen, a flat surface is exposed by sawing with a diamond saw blade at constant speed and constant pressure using a custom-built cryosaw. Transfer into the electron probe column (Cameca, MBX) is made using a simple transfer device maintaining the sample under liquid nitrogen in an interlock chamber mounted on the electron probe column. After the liquid nitrogen is evaporated by creating a vacuum, the sample is pushed into the special stage of the instrument. The sample is maintained at close to liquid nitrogen temperature by circulation of liquid nitrogen in the special stage.

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1250-kilovolt scanning transmission electron microscope

Proceedings, annual meeting, Electron Microscopy Society of America ◽

10.1017/s0424820100113007 ◽

1984 ◽

Vol 42 ◽

pp. 624-625

Author(s):

T. Imura ◽

S. Maruse ◽

K. Mihama ◽

M. Iseki ◽

M. Hibino ◽

...

Keyword(s):

High Voltage ◽

Electron Probe ◽

Scanning Transmission Electron Microscope ◽

Pressure Vessels ◽

Practical Applications ◽

Voltage Generator ◽

Transmission Electron ◽

Scanning Transmission ◽

New Applications ◽

High Voltage Generator

Ultra high voltage STEM has many inherent technical advantages over CTEM. These advantages include better signal detectability and signal processing capability. It is hoped that it will explore some new applications which were previously not possible. Conventional STEM (including CTEM with STEM attachment), however, has been unable to provide these inherent advantages due to insufficient performance and engineering problems. Recently we have developed a new 1250 kV STEM and completed installation at Nagoya University in Japan. It has been designed to break through conventional engineering limitations and bring about theoretical advantage in practical applications.In the design of this instrument, we exercised maximum care in providing a stable electron probe. A high voltage generator and an accelerator are housed in two separate pressure vessels and they are connected with a high voltage resistor cable.(Fig. 1) This design minimized induction generated from the high voltage generator, which is a high frequency Cockcroft-Walton type, being transmitted to the electron probe.

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Analysis of completed commercial semiconductors using EPMA

Proceedings, annual meeting, Electron Microscopy Society of America ◽

10.1017/s0424820100164970 ◽

1996 ◽

Vol 54 ◽

pp. 502-503

Author(s):

R. Packwood ◽

M.W. Phaneuf ◽

V. Weatherall ◽

I. Bassignana

Keyword(s):

Electron Probe Microanalysis ◽

Electron Probe ◽

Semiconductor Industry ◽

Detection Limits ◽

High Technology ◽

Depth Resolution ◽

Analytical Instruments ◽

Wide Range ◽

Numerous Element ◽

Choice Method

The development of specialized analytical instruments such as the SIMS, XPS, ISS etc., all with truly incredible abilities in certain areas, has given rise to the notion that electron probe microanalysis (EPMA) is an old fashioned and rather inadequate technique, and one that is of little or no use in such high technology fields as the semiconductor industry. Whilst it is true that the microprobe does not possess parts-per-billion sensitivity (ppb) or monolayer depth resolution it is also true that many times these extremes of performance are not essential and that a few tens of parts-per-million (ppm) and a few tens of nanometers depth resolution is all that is required. In fact, the microprobe may well be the second choice method for a wide range of analytical problems and even the method of choice for a few.The literature is replete with remarks that suggest the writer is confusing an SEM-EDXS combination with an instrument such as the Cameca SX-50. Even where this confusion does not exist, the literature discusses microprobe detection limits that are seldom stated to be as low as 100 ppm, whereas there are numerous element combinations for which 10-20 ppm is routinely attainable.

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