Novel slack-based robust scheduling rule for a semiconductor manufacturing system with uncertain processing time

The wafer-level packaging process is an important technology used in semiconductor manufacturing, and how to effectively control this manufacturing system is thus an important issue for packaging firms. One way to aid in this process is to use a forecasting tool. However, the number of observations collected in the early stages of this process is usually too few to use with traditional forecasting techniques, and thus inaccurate results are obtained. One potential solution to this problem is the use of grey system theory, with its feature of small dataset modeling. This study thus uses the AGM(1,1) grey model to solve the problem of forecasting in the pilot run stage of the packaging process. The experimental results show that the grey approach is an appropriate and effective forecasting tool for use with small datasets and that it can be applied to improve the wafer-level packaging process.

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Real-time response and system integration in a back-end semiconductor manufacturing system

Conference Record of the 2002 IEEE Industry Applications Conference. 37th IAS Annual Meeting (Cat. No.02CH37344) ◽

10.1109/ias.2002.1044156 ◽

2003 ◽

Cited By ~ 4

Author(s):

R. Qiu

Keyword(s):

Real Time ◽

System Integration ◽

Semiconductor Manufacturing ◽

Manufacturing System ◽

Time Response

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Evaluation System and Correlation Analysis for Determining the Performance of a Semiconductor Manufacturing System

Complex System Modeling and Simulation ◽

10.23919/csms.2021.0015 ◽

2021 ◽

Vol 1 (3) ◽

pp. 218-231

Author(s):

Qingyun Yu ◽

Li Li ◽

Hui Zhao ◽

Ying Liu ◽

Kuo-Yi Lin

Keyword(s):

Correlation Analysis ◽

Semiconductor Manufacturing ◽

Evaluation System ◽

Manufacturing System

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The shortest processing time first (SPTF) dispatch rule and some variants in semiconductor manufacturing

Proceeding of the 2001 Winter Simulation Conference (Cat. No.01CH37304) ◽

10.1109/wsc.2001.977437 ◽

2002 ◽

Cited By ~ 18

Author(s):

O. Rose

Keyword(s):

Semiconductor Manufacturing ◽

Processing Time

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A STOCHASTIC BATCHING AND SCHEDULING PROBLEM

Probability in the Engineering and Informational Sciences ◽

10.1017/s0269964801154033 ◽

2001 ◽

Vol 15 (4) ◽

pp. 465-479 ◽

Cited By ~ 2

Author(s):

Ger Koole ◽

Rhonda Righter

Keyword(s):

Optimal Policy ◽

Semiconductor Manufacturing ◽

Processing Time ◽

Polynomial Time Algorithm ◽

Time Algorithm ◽

Flow Time ◽

Batch Scheduling ◽

Scheduling Problem ◽

Processing Times ◽

Deterministic Problem

We consider a batch scheduling problem in which the processing time of a batch of jobs equals the maximum of the processing times of all jobs in the batch. This is the case, for example, for burn-in operations in semiconductor manufacturing and other testing operations. Processing times are assumed to be random, and we consider minimizing the makespan and the flow time. The problem is much more difficult than the corresponding deterministic problem, and the optimal policy may have many counterintuitive properties. We prove various structural properties of the optimal policy and use these to develop a polynomial-time algorithm to compute the optimal policy.

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