Proton Beam Writing Device Based on Electrostatic Accelerator for 3D Micro- and Nano-Structure Fabrication
2019 ◽
Vol 15
(4)
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pp. 62-69
◽
O.G. Ponomarev
◽
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V.А. Rebrov
◽
S.V. Kolinko
◽
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...
2019 ◽
Vol 15
(4)
◽
pp. 55-61
O.G. Ponomarev
◽
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V.А. Rebrov
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S.V. Kolinko
◽
◽
...
2016 ◽
Vol 61
(9)
◽
pp. 1411-1417
◽
A. S. Lapin
◽
V. A. Rebrov
◽
S. V. Kolin’ko
◽
V. F. Salivon
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A. G. Ponomarev
2008 ◽
Vol 41
(19)
◽
pp. 192002
◽
S Venugopal Rao
◽
A A Bettiol
◽
F Watt
2015 ◽
Vol 348
◽
pp. 23-28
◽
Nannan Liu
◽
P. Santhana Raman
◽
Xinxin Xu
◽
Huei Ming Tan
◽
Anjam Khursheed
◽
...
2005 ◽
Vol 231
(1-4)
◽
pp. 372-377
◽
F. Menzel
◽
D. Spemann
◽
J. Lenzner
◽
J. Vogt
◽
T. Butz
2014 ◽
Vol 32
(6)
◽
pp. 06F506
◽
Hijiri Kato
◽
Junichi Takahashi
◽
Hiroyuki Nishikawa
Andrew A. Bettiol
◽
Kambiz Ansari
◽
Tze Chien Sum
◽
Jeroen A. van Kan
◽
Frank Watt
2013 ◽
Vol 31
(6)
◽
pp. 06F403
◽
Hiroyuki Nishikawa
◽
Takashi Hozumi
Daniel J. Blackwood
◽
Ee Jin Teo
2012 ◽
Vol 83
(2)
◽
pp. 02B902
◽
J. A. van Kan
◽
P. Malar
◽
Armin Baysic de Vera