Box 13: Silicon Micro/Nano-Fabrication Using Proton Beam Writing and Electrochemical Etching

2009 ◽  
pp. 323-328
Author(s):  
Daniel J. Blackwood ◽  
Ee Jin Teo
Keyword(s):  
Proton Beam ◽  
Electrochemical Etching ◽  
Nano Fabrication ◽  
Proton Beam Writing

scholarly journals Silicon-based photonic crystals fabricated using proton beam writing combined with electrochemical etching method

2012 ◽  
Vol 7 (1) ◽  
Author(s):  
Zhiya Dang ◽  
Mark BH Breese ◽  
Gonzalo Recio-Sánchez ◽  
Sara Azimi ◽  
Jiao Song ◽  
...  
Keyword(s):  
Photonic Crystals ◽  
Proton Beam ◽  
Electrochemical Etching ◽  
Proton Beam Writing ◽  
Etching Method ◽  
Silicon Based

Development of ion sources: Towards high brightness for proton beam writing applications

2015 ◽  
Vol 348 ◽  
pp. 23-28 ◽  
Author(s):  
Nannan Liu ◽  
P. Santhana Raman ◽  
Xinxin Xu ◽  
Huei Ming Tan ◽  
Anjam Khursheed ◽  
...  
Keyword(s):  
Proton Beam ◽  
Ion Sources ◽  
High Brightness ◽  
Proton Beam Writing

Fabrication of micro-optical components in polymer using proton beam writing

2004 ◽  
Author(s):  
Andrew A. Bettiol ◽  
Kambiz Ansari ◽  
Tze Chien Sum ◽  
Jeroen A. van Kan ◽  
Frank Watt
Keyword(s):  
Proton Beam ◽  
Optical Components ◽  
Proton Beam Writing

The second generation Singapore high resolution proton beam writing facility

2012 ◽  
Vol 83 (2) ◽  
pp. 02B902 ◽  
Author(s):  
J. A. van Kan ◽  
P. Malar ◽  
Armin Baysic de Vera
Keyword(s):  
High Resolution ◽  
Proton Beam ◽  
Second Generation ◽  
Proton Beam Writing

Fabrication of Poly(9,9$'$-dioctylfluorene)-Based Nano- and Microstructures by Proton Beam Writing

2012 ◽  
Vol 51 ◽  
pp. 045201
Author(s):  
Yuta Maeyoshi ◽  
Katsuyoshi Takano ◽  
Atsushi Asano ◽  
Hiromi Marui ◽  
Masaaki Omichi ◽  
...  
Keyword(s):  
Proton Beam ◽  
Proton Beam Writing
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