Box 13: Silicon Micro/Nano-Fabrication Using Proton Beam Writing and Electrochemical Etching
Keyword(s):
2008 ◽
Vol 41
(19)
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pp. 192002
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2005 ◽
Vol 231
(1-4)
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pp. 372-377
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2014 ◽
Vol 32
(6)
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pp. 06F506
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2013 ◽
Vol 31
(6)
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pp. 06F403
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2012 ◽
Vol 83
(2)
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pp. 02B902
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2011 ◽
Vol 269
(20)
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pp. 2448-2451
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