scholarly journals Epitaxial GaAs Films Deposited by Molecular Beam Method

1973 ◽  
Vol 93 (10) ◽  
pp. 434-440
Author(s):  
M. NAGANUMA ◽  
K. TAKAHASHI
1973 ◽  
Vol 93 (5) ◽  
pp. 19-24 ◽  
Author(s):  
M. Naganuma ◽  
K. Takahashi

1986 ◽  
Vol 82 ◽  
Author(s):  
R. Hull ◽  
A. Fischer-Colbrie ◽  
S.J. Rosner ◽  
S.M. Koch ◽  
J.S. Harris

ABSTRACTNucleation and growth of GaAs fIlms deposited by Molecular Beam Epitaxy upon Si(l00) substrates are studied by transmission electron microscopy. The initial nucleation of GaAs consists of approximately hemispherical islands associated with steps upon the substratesurface and coherently strained to the substrate lattice. As the island size increases, crystalline defects relax the strain between epilayer and substrate. Island coalescence is a secondary defect generation mechanism. Subsequent growth of the epitaxial GaAs layer reveals a progressive deterioration of the GaAs/Si interface planarity and the growth and eventual dissolution of amorphous or misoriented crystalline regions at the GaAs/Si interface.


1994 ◽  
Vol 64 (2) ◽  
pp. 202-204 ◽  
Author(s):  
W. E. Hoke ◽  
D. G. Weir ◽  
P. J. Lemonias ◽  
H. T. Hendriks

2001 ◽  
Vol 46 (4) ◽  
pp. 411-416 ◽  
Author(s):  
G. B. Galiev ◽  
V. G. Mokerov ◽  
V. V. Saraikin ◽  
Yu. V. Slepnev ◽  
G. I. Shagimuratov ◽  
...  

Author(s):  
S. H. Chen

Sn has been used extensively as an n-type dopant in GaAs grown by molecular-beam epitaxy (MBE). The surface accumulation of Sn during the growth of Sn-doped GaAs has been observed by several investigators. It is still not clear whether the accumulation of Sn is a kinetically hindered process, as proposed first by Wood and Joyce, or surface segregation due to thermodynamic factors. The proposed donor-incorporation mechanisms were based on experimental results from such techniques as secondary ion mass spectrometry, Auger electron spectroscopy, and C-V measurements. In the present study, electron microscopy was used in combination with cross-section specimen preparation. The information on the morphology and microstructure of the surface accumulation can be obtained in a fine scale and may confirm several suggestions from indirect experimental evidence in the previous studies.


1986 ◽  
Vol 25 (Part 2, No. 7) ◽  
pp. L598-L600 ◽  
Author(s):  
Toshio Fujii ◽  
Yoshiaki Nakata ◽  
Shunichi Muto ◽  
Satoshi Hiyamizu

1992 ◽  
Vol 61 (13) ◽  
pp. 1585-1587 ◽  
Author(s):  
H. Shen ◽  
F. C. Rong ◽  
R. Lux ◽  
J. Pamulapati ◽  
M. Taysing‐Lara ◽  
...  

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