Model-Based Control for Rapid Thermal Processing of Semiconductor Wafers

IEEJ Transactions on Industry Applications ◽

10.1541/ieejias.131.159 ◽

2011 ◽

Vol 131 (2) ◽

pp. 159-165 ◽

Author(s):

Ryota Takagi ◽

Kang-Zhi Liu

Keyword(s):

Thermal Processing ◽

Rapid Thermal Processing ◽

Model Based Control ◽

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Model-based control of rapid thermal processing for semiconductor wafers

Proceedings of the 2004 American Control Conference ◽

10.23919/acc.2004.1383921 ◽

2004 ◽

Author(s):

J.L. Ebert ◽

D. de Roover ◽

L.L. Porter ◽

V.A. Lisiewicz ◽

S. Ghosal ◽

...

Keyword(s):

Thermal Processing ◽

Rapid Thermal Processing ◽

Model Based Control ◽

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Model-based control of rapid thermal processing systems

[Proceedings 1992] The First IEEE Conference on Control Applications ◽

10.1109/cca.1992.269846 ◽

2003 ◽

Author(s):

P.J. Gyugyi ◽

Y.M. Cho ◽

G. Franklin ◽

T. Kailath ◽

R.H. Roy

Keyword(s):

Thermal Processing ◽

Rapid Thermal Processing ◽

Model Based Control ◽

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Model-based control in rapid thermal processing

Thin Solid Films ◽

10.1016/s0040-6090(99)01049-4 ◽

2000 ◽

Vol 365 (2) ◽

pp. 322-333 ◽

Author(s):

K.S. Balakrishnan ◽

T.F. Edgar

Keyword(s):

Thermal Processing ◽

Rapid Thermal Processing ◽

Model Based Control ◽

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Model-based control of semiconductor processing equipment: rapid thermal processing example

Proceedings of IEEE Systems Man and Cybernetics Conference - SMC ◽

10.1109/icsmc.1993.384843 ◽

2002 ◽

Author(s):

R.S. Gyurcsik ◽

R.K. Cavin ◽

F.Y. Sorrell

Keyword(s):

Thermal Processing ◽

Rapid Thermal Processing ◽

Semiconductor Processing ◽

Model Based Control ◽

Processing Equipment ◽

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Model-based emissivity correction in pyrometer temperature control of rapid thermal processing systems

IEEE Transactions on Semiconductor Manufacturing ◽

10.1109/66.238178 ◽

1993 ◽

Vol 6 (3) ◽

pp. 273-276 ◽

Author(s):

F.Y. Sorrell ◽

R.S. Gyurcsik

Keyword(s):

Temperature Control ◽

Thermal Processing ◽

Rapid Thermal Processing ◽

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Model-based Control Techniques for Large-Scale High-Precision Stage

IEEJ Transactions on Industry Applications ◽

10.1541/ieejias.140.272 ◽

2020 ◽

Vol 140 (4) ◽

pp. 272-280

Author(s):

Wataru Ohnishi ◽

Hiroshi Fujimoto ◽

Koichi Sakata

Keyword(s):

High Precision ◽

Large Scale ◽

Model Based Control ◽

Precision Stage ◽

Control Techniques ◽

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SIMULATION ASSISTED ADAPTION OF A MODEL BASED CONTROL PARAMETER FINE-TUNING METHODOLOGY FOR A NONRESIDENTIAL BUILDING WITH A COMPLEX ENERGY SYSTEM

Proceedings of SEBUA-12 ICHMT International Symposium on Sustainable Energy in Buildings and Urban Areas ◽

10.1615/ichmt.2012.sebua-12.320 ◽

2012 ◽

Author(s):

Ana Constantin ◽

Johannes Fuetterer ◽

Rita Streblow ◽

Dirk Muller ◽

Giorgos D. Kontes ◽

...

Keyword(s):

Control Parameter ◽

Energy System ◽

Fine Tuning ◽

Complex Energy ◽

Model Based Control ◽

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Reduced-Order Model Based Control of Large Flexible Manipulators: Theory and Experiments

10.23919/acc.1990.4791034 ◽

1990 ◽

Author(s):

Brian T. Reisenauer ◽

Mark J. Balas ◽

Madison Ramey

Keyword(s):

Reduced Order Model ◽

Flexible Manipulators ◽

Order Model ◽

Reduced Order ◽

Model Based Control ◽

Model Based ◽

Theory And Experiments

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Model Based Control of Combustion

10.21236/ada376608 ◽

1999 ◽

Author(s):

Nicholas G. Osburn

Keyword(s):

Model Based Control ◽

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Intelligent Neurofuzzy Model Based Control of Electrically Heated Micro Heat Exchanger

Lecture Notes in Computer Science - AI*IA 2005: Advances in Artificial Intelligence ◽

10.1007/11558590_61 ◽

2005 ◽

pp. 603-607

Author(s):

F. Habibipour Roudsari ◽

M. Khajepour ◽

M. Galily

Keyword(s):

Heat Exchanger ◽

Model Based Control ◽

Model Based ◽

Micro Heat Exchanger

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