scholarly journals Now or Never. Plasma Based Ion Implantation for Three-Dimensional Surface Modification and Process. Development of Plasma Sources for Plasma Immersion Ion Implantation.

2001 ◽  
Vol 121 (5) ◽  
pp. 308-311 ◽  
Author(s):  
YUICHI SETSUHARA
2004 ◽  
Vol 186 (1-2) ◽  
pp. 204-208 ◽  
Author(s):  
K.G Kostov ◽  
M Ueda ◽  
M Lepiensky ◽  
P.C Soares ◽  
G.F Gomes ◽  
...  

2013 ◽  
Vol 229 ◽  
pp. 97-104 ◽  
Author(s):  
M. Ueda ◽  
R.M. Oliveira ◽  
J.O. Rossi ◽  
C.B. Mello ◽  
Rita C.C. Rangel ◽  
...  

2011 ◽  
Vol 24 (4) ◽  
pp. 461-467 ◽  
Author(s):  
Luiz Meirelles ◽  
Emilia Tieko Uzumaki ◽  
Jose Henrique Cavalcanti Lima ◽  
Carlos Alberto Muller ◽  
Tomas Albrektsson ◽  
...  

2004 ◽  
Vol 186 (1-2) ◽  
pp. 295-298 ◽  
Author(s):  
M Ueda ◽  
K.G Kostov ◽  
A.F Beloto ◽  
N.F Leite ◽  
K.G Grigorov

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