Now or Never. Plasma Based Ion Implantation for Three-Dimensional Surface Modification and Process. Development of Plasma Sources for Plasma Immersion Ion Implantation.
2001 ◽
Vol 121
(5)
◽
pp. 308-311
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2001 ◽
Vol 121
(5)
◽
pp. 316-319
2001 ◽
Vol 121
(5)
◽
pp. 320-321
Keyword(s):
2001 ◽
Vol 121
(5)
◽
pp. 302-303
◽
2001 ◽
Vol 121
(5)
◽
pp. 312-315
2001 ◽
Vol 121
(5)
◽
pp. 304-307
Keyword(s):
2004 ◽
Vol 186
(1-2)
◽
pp. 204-208
◽
2013 ◽
Vol 229
◽
pp. 97-104
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2006 ◽
Vol 17
(11-12)
◽
pp. 898-901
◽
2011 ◽
Vol 24
(4)
◽
pp. 461-467
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2004 ◽
Vol 186
(1-2)
◽
pp. 295-298
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