The Displacement Measurement Device using a Comb-Drive Actuator
2007 ◽
Vol 127
(3)
◽
pp. 148-152
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2012 ◽
Vol 33
(06)
◽
pp. 439-444
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2019 ◽
Vol 31
(11)
◽
pp. 04019248
2010 ◽
Vol 130
(2)
◽
pp. 267-274
◽
2012 ◽
Vol 132
(1)
◽
pp. 1-9
◽
Keyword(s):
2016 ◽
Vol 136
(9)
◽
pp. 370-376
2002 ◽
Vol 58
(5-6)
◽
pp. 5