Review of Development and Performance Evaluation of Active-matrix Nanocrystalline Si Electron Emitter Array for Massively Parallel Electron Beam Direct-write Lithography
2015 ◽
Vol 135
(6)
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pp. 221-229
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2012 ◽
Vol 11
(3)
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pp. 031406
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2013 ◽
Vol 31
(6)
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pp. 06F703
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2014 ◽
Vol 134
(6)
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pp. 146-153
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2015 ◽
Vol 14
(3)
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pp. 031215
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