Transfer of Ferroelectric Thin Film Capacitor Using Internal Stress of Plated Film

2021 ◽  
Vol 141 (2) ◽  
pp. 39-43
Author(s):  
Kazutaka Sueshige ◽  
Masahisa Fujino ◽  
Tadatomo Suga ◽  
Masaaki Ichiki
Keyword(s):  
Thin Film ◽  
Internal Stress ◽  
Ferroelectric Thin Film ◽  
Film Capacitor ◽  
Thin Film Capacitor

Spalling Technology of PZT Thin Film Capacitor using Internal Stress

2014 ◽  
Vol 134 (4) ◽  
pp. 85-89
Author(s):  
Kazutaka Sueshige ◽  
Fumiaki Honda ◽  
Tadatomo Suga ◽  
Masaaki Ichiki ◽  
Toshihiro Itoh
Keyword(s):  
Thin Film ◽  
Internal Stress ◽  
Film Capacitor ◽  
Thin Film Capacitor ◽  
Pzt Thin Film

Delamination behavior of Pt in a SiO2/Pt/Pb(ZrxTi1−x)O3/Pt ferroelectric thin-film capacitor

2001 ◽  
Vol 89 (4) ◽  
pp. 2327-2331 ◽  
Author(s):  
Youngsoo Park ◽  
June Key Lee ◽  
Ilsub Chung ◽  
Jai-Young Lee
Keyword(s):  
Thin Film ◽  
Ferroelectric Thin Film ◽  
Film Capacitor ◽  
Thin Film Capacitor ◽  
Delamination Behavior

Slow Dielectric Relaxation in SrRuO 3 /Ba 0.8 Sr 0.2 TiO 3 /SrRuO 3 Ferroelectric Thin Film Capacitor Structures

2003 ◽  
Vol 286 (1) ◽  
pp. 251-259 ◽  
Author(s):  
V. V. Lemanov ◽  
B. M. Goltsman ◽  
V. K. Yarmarkin ◽  
Yu. A. Boikov
Keyword(s):  
Thin Film ◽  
Dielectric Relaxation ◽  
Ferroelectric Thin Film ◽  
Film Capacitor ◽  
Thin Film Capacitor

A C-V model of ferroelectric thin film capacitor

1997 ◽  
Vol 197 (1) ◽  
pp. 111-114 ◽  
Author(s):  
Chen Zheng ◽  
Tang Ting-Ao
Keyword(s):  
Thin Film ◽  
Ferroelectric Thin Film ◽  
Film Capacitor ◽  
Thin Film Capacitor
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