Polarization Resolved Grazing Angle Scatterometry for In Situ Monitoring of Roughness for Silicon and Compound Solar Cells, Light Emitting Devices and other Structured Surfaces

ABSTRACTNovel metrology tool for in-situ characterization of surfaces semiconductor solar cells (both silicon and compound), and Light Emitting Device diffusers is presented. The tool measures the total integrated scattering when measuring forward, or back-reflection at very large angles of incidence. The tool is insensitive to vibrations and stray light. We discuss polarization resolved data and characterize our technique using NIST traceable standards. We discuss it’s applications to semiconductor manufacturing.

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In Situ Characterization of the Triphase Contact Line in a Brush-Coating Process: Toward the Enhanced Efficiency of Polymer Solar Cells

ACS Applied Materials & Interfaces ◽

10.1021/acsami.8b15746 ◽

2018 ◽

Vol 10 (46) ◽

pp. 39448-39454 ◽

Cited By ~ 5

Author(s):

Cheng Guo ◽

Xiaoyu Gao ◽

Fang-Ju Lin ◽

Qianbin Wang ◽

Lili Meng ◽

...

Keyword(s):

Solar Cells ◽

Contact Line ◽

Polymer Solar Cells ◽

Coating Process ◽

In Situ Characterization ◽

Brush Coating

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In-Situ Characterization of Individual Building Blocks for Nanophotonic Solar Cells by Correlative Microscopy

Microscopy and Microanalysis ◽

10.1017/s1431927616012277 ◽

2016 ◽

Vol 22 (S5) ◽

pp. 50-51 ◽

Cited By ~ 1

Author(s):

Sebastian W. Schmitt ◽

George Sarau ◽

Silke H. Christiansen

Keyword(s):

Solar Cells ◽

Building Blocks ◽

Correlative Microscopy ◽

In Situ Characterization

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In-situ characterization of polymer crystallization using a low-cost light emitting diode array as optical receiver with photogain

Proceedings of the 21st IEEE Instrumentation and Measurement Technology Conference (IEEE Cat. No.04CH37510) ◽

10.1109/imtc.2004.1351544 ◽

2004 ◽

Author(s):

F. De Santis ◽

H.C. Neitzert

Keyword(s):

Light Emitting Diode ◽

Low Cost ◽

Polymer Crystallization ◽

Optical Receiver ◽

Diode Array ◽

In Situ Characterization ◽

Light Emitting

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In-situ characterization of electron-assisted regeneration of Cz-Si solar cells

Solar Energy Materials and Solar Cells ◽

10.1016/j.solmat.2018.05.023 ◽

2018 ◽

Vol 185 ◽

pp. 283-286 ◽

Cited By ~ 4

Author(s):

L. Helmich ◽

D.C. Walter ◽

D. Bredemeier ◽

R. Falster ◽

V.V. Voronkov ◽

...

Keyword(s):

Solar Cells ◽

In Situ Characterization ◽

Si Solar Cells

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Heteroepitaxy of GaN on Silicon: In Situ Measurements

Materials Science Forum ◽

10.4028/www.scientific.net/msf.483-485.1051 ◽

2005 ◽

Vol 483-485 ◽

pp. 1051-1056

Author(s):

A. Krost ◽

Armin Dadgar ◽

F. Schulze ◽

R. Clos ◽

K. Haberland ◽

...

Keyword(s):

Low Cost ◽

Group Iii Nitrides ◽

In Situ Monitoring ◽

Attractive Alternative ◽

Light Emitting ◽

Group Iii ◽

Light Emitting Devices ◽

Thermal Expansion Coefficients ◽

Long Time

Due to the lack of GaN wafers, so far, group-III nitrides are mostly grown on sapphire or SiC substrates. Silicon offers an attractive alternative because of its low cost, large wafer area, and physical benefits such as the possibility of chemical etching, lower hardness, good thermal conductivity, and electrical conducting or isolating for light emitting devices or transistor structures, respectively. However, for a long time, a technological breakthrough of GaN-on-silicon has been thought to be impossible because of the cracking problem originating in the huge difference of the thermal expansion coefficients between GaN and silicon which leads to tensile strain and cracking of the layers when cooling down. However, in recent years, several approaches to prevent cracking and wafer bowing have been successfully applied. Nowadays, device-relevant thicknesses of crackfree group-III-nitrides can be grown on silicon. To reach this goal the most important issues were the identification of the physical origin of strains and its engineering by means of in situ monitoring during metalorganic vapor phase epitaxy.

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Laser metrology for in-situ monitoring of roughness for diffusers for light emitting devices and laser manufacturing

Journal of Laser Applications ◽

10.2351/1.4983521 ◽

2017 ◽

Vol 29 (2) ◽

pp. 022602 ◽

Cited By ~ 2

Author(s):

Wojtek J. Walecki ◽

Peter S. Walecki ◽

Eve S. Walecki ◽

Abigail S. Walecki

Keyword(s):

In Situ Monitoring ◽

Light Emitting ◽

Light Emitting Devices ◽

Laser Manufacturing ◽

Laser Metrology

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Characterization of the glycoconjugates of boar testis and epididymis

Reproduction ◽

10.1530/reprod/120.2.325 ◽

2000 ◽

pp. 325-335 ◽

Cited By ~ 29

Author(s):

A Calvo ◽

LM Pastor ◽

S Bonet ◽

E Pinart ◽

M Ventura

Keyword(s):

Ricinus Communis ◽

Lectin Histochemistry ◽

Apical Part ◽

Seminiferous Tubules ◽

In Situ Characterization ◽

Intense Staining ◽

Terminal Galactose ◽

Boar Spermatozoa

Lectin histochemistry was used to perform in situ characterization of the glycoconjugates present in boar testis and epididymis. Thirteen horseradish peroxidase- or digoxigenin-labelled lectins were used in samples obtained from healthy fertile boars. The acrosomes of the spermatids were stained intensely by lectins with affinity for galactose and N-acetyl-galactosamine residues, these being soybean, peanut and Ricinus communis agglutinins. Sertoli cells were stained selectively by Maackia ammurensis agglutinin. The lamina propria of seminiferous tubules showed the most intense staining with fucose-binding lectins. The Golgi area and the apical part of the principal cells of the epididymis were stained intensely with many lectins and their distribution was similar in the three zones of the epididymis. On the basis of lectin affinity, both testis and epididymis appear to have N- and O-linked glycoconjugates. Spermatozoa from different epididymal regions showed different expression of terminal galactose and N-acetyl-galactosamine. Sialic acid (specifically alpha2,3 neuraminic-5 acid) was probably incorporated into spermatozoa along the extratesticular ducts. These findings indicate that the development and maturation of boar spermatozoa are accompanied by changes in glycoconjugates. As some lectins stain cellular or extracellular compartments specifically, these lectins could be useful markers in histopathological evaluation of diseases of boar testis and epididymis.

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