Atomic layer deposition of zirconium oxide thin films
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Abstract
2016 ◽
Vol 32
(1)
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pp. 37-44
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2010 ◽
Vol 157
(10)
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pp. G193
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2012 ◽
Vol 116
(27)
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pp. 14656-14664
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2015 ◽
Vol 21
(7-8-9)
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pp. 181-187
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2003 ◽
Vol 249
(1-2)
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pp. 251-261
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2004 ◽
Vol 374
(1-2)
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pp. 124-128
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