Reactive Multilayer Foils for Silicon Wafer Bonding
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ABSTRACTIn this study silicon wafers were bonded using Al/Ni reactive multilayer foils as local heat sources for melting solder layers. Exothermic reactions in Al/Ni reactive multilayer foils were investigated by XRD and DSC. XRD measurements showed that dominant product after exothermic reaction was ordered B2 AlNi compound. The heat of reaction was calculated to be -57.9 KJ/mol by DSC. With Al/Ni reactive multilayer foil, localized heating can be achieved during bonding process. Both experimental measurements and numerical simulation showed that the heat exposure to the wafers was highly limited and localized. Moreover, leakage test showed that this bonding approach possessed a good hermeticity.
2008 ◽
Vol 612
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pp. 291-310
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1970 ◽
Vol 320
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pp. 71-100
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2018 ◽
Vol 70
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pp. 279-298
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2004 ◽
Vol 1
(3)
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pp. 187-193
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2011 ◽
Vol 2011
(1)
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pp. 000521-000526
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Identification of the constants of heat transfer in arbitrary thermal modes using local heat sources
1993 ◽
Vol 65
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pp. 1173-1181
2013 ◽
Vol 39
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pp. 333-336
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