Substrate Effects in In-Situ Growth of Perovskites by Pulsed Laser Deposition

1991 ◽  
Vol 243 ◽  
Author(s):  
K. F. Etzold ◽  
R. A. Roy ◽  
K. L. Saenger

AbstractIn this study we report on in-situ growth of lead zirconate titanate (PbZr1-xTixO3, PZT) and strontium titanate (SrTiO3, STO) films by pulsed laser deposition at 248 nm. Films were deposited in an oxygen background at elevated temperatures on a variety of substrates including MgO(l00), Pt(100)/MgO(100), Pt(111)/MgO(111), Pt(110)/MgO(110), Pt(111)/SiO2/Si, and Pt(111)/glass.Deposited films were characterized by Rutherford Backscattering Spectroscopy (RBS), x-ray diffraction (XRD), and electrical (dielectric constant and leakage) measurements. A strong substrate dependence was found for both the fraction of pyrochlore (Pb2Zr2-xTixO7) phase in the PZT films, and the STO film dielectric constants. The origin of the substrate dependence is discussed with regard to nucleation and interface layer cffects, and the chemistry of the relevant materials.

1990 ◽  
Author(s):  
J. B. Boyce ◽  
G. A. N. Connell ◽  
D. K. Fork ◽  
D. B. Fenner ◽  
K. Char ◽  
...  

1998 ◽  
Vol 307 (3-4) ◽  
pp. 298-306 ◽  
Author(s):  
J. Garcı́a López ◽  
D.H.A. Blank ◽  
H. Rogalla ◽  
J. Siejka

1996 ◽  
Vol 459 ◽  
Author(s):  
Johanna L. Lacey ◽  
Susan Trolier-McKinstry

ABSTRACTLead zirconate titanate thin films offer considerably larger piezoelectric coefficients than do ZnO, and so are attractive for microelectromechanical sensors and actuators. To date, much of the research in this field has concentrated on undoped PZT. In this work, PZT films grown from both hard and soft PZT targets have been deposited on platinum coated silicon wafers by pulsed laser deposition so that the effect of doping on the properties can be determined. Dielectric constants of 1000–1500 are regularly achieved in both types of films, with loss values varying from 0.01 for soft films to 0.03 for hard films. Remanent polarizations are typically 30 μC/cm2 for both types of films with no observable difference in coercive fields. When subjected to ∼140 MPa of biaxial tension and compression, only small (∼5%) reversible changes were observed, indicating a lack of substantial domain reorientation in the films.


2013 ◽  
Vol 103 (19) ◽  
pp. 192109 ◽  
Author(s):  
S. R. Sarath Kumar ◽  
Pradipta K. Nayak ◽  
M. N. Hedhili ◽  
M. A. Khan ◽  
H. N. Alshareef

2016 ◽  
Vol 6 (1) ◽  
Author(s):  
Silvia Haindl ◽  
Kota Hanzawa ◽  
Hikaru Sato ◽  
Hidenori Hiramatsu ◽  
Hideo Hosono

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