Thermal and Mechanical Properties of Diamond-Like a-C:H Films

1992 ◽  
Vol 270 ◽  
Author(s):  
G. Amato ◽  
G. Benedetto ◽  
L. Boarino ◽  
F. Demichelis ◽  
C. F. Pirri ◽  
...  

ABSTRACTDiamond-like amorphous carbon and hydrogenated amorphous carbon films (DLC) prepared by rf sputtering have been characterized by means of measurements of optical gap, hardness and Young's modulus. Preliminary results of the application of the photothermal displacement technique (PTD) are also reported, confirming that this method can in principle be applied for a more complete characterization of DLC films at room temperature and low temperatures.

2002 ◽  
Vol 16 (06n07) ◽  
pp. 1096-1100 ◽  
Author(s):  
Y. HAYASHI ◽  
S. ISHIKAWA ◽  
T. SOGA ◽  
T. JIMBO ◽  
M. ADACHI ◽  
...  

We report on the efficient photoluminescence (PL) and optical properties of hydrogenated amorphous carbon thin films codoped with nitrogen and trimethylboron (TMB) grown by rf plasma-enhanced chemical vapor deposition at room temperature. The study clearly shows the observation of discrete PL emission peaks. The PL intensity of the film deposited with 20 sccm TMB is more than 103 times than that of the film deposited without TMB. The change of optical bandgap and PL emission energy with TMB flow rate are discussed based on sp3 and sp2 C networks. Angular dependence of the PL spectra revealed that the origin of multiple sharp peaks is due to Fabry-Perot cavity interference effect.


2005 ◽  
Vol 19 (11) ◽  
pp. 489-501 ◽  
Author(s):  
M. RUSOP ◽  
X. M. TIAN ◽  
T. SOGA ◽  
T. JIMBO ◽  
M. UMENO

Hydrogenated amorphous carbon films ( a - C : H ) were deposited on p -type silicon ( a - C : H / p - Si ) and quartz substrates by excimer laser at room temperature using mixture ratios 1 to 9 and 3 to 7 of camphor to graphite by weight percentages. The presence of hydrogen in the a-C:H films has been confirmed by Fourier transform infrared spectroscopy (FTIR) measurements. The structure and optical properties of a - C : H films were respectively investigated by Raman scattering and UV-visible spectroscopy. The increase of sp 3 sites in the a - C : H films has also been confirmed by the Raman spectra spectroscopy analysis. The increase of the optical band gap with higher camphor percentage in the target was believed to be due to the increase of the sp 3 hybrid forms of carbon arising from camphor incorporation. The formation of a heterojunction between the a - C : H film and Si substrate was confirmed by current–voltage (I–V) measurement. The structure of a - C : H / p - Si cells deposited using mixture ratios 1 to 9 of camphor to graphite by weight percentages showed better photovoltaic characteristics with an open-circuit voltage of 400 mV and short-circuit current density of about 15 mA/cm2 under AM 1.5 (100 mW/cm2 at room temperature) illumination. The energy conversion efficiency and fill factor were found to be approximately 2.1% and 0.38, respectively. The carbon layer contributed to the energy conversion efficiency in the lower wavelength region has been proved by the quantum efficiency measurement.


1991 ◽  
Vol 30 (Part 2, No. 9A) ◽  
pp. L1539-L1541 ◽  
Author(s):  
Noboru Ohtani ◽  
Masakazu Katsuno ◽  
Toshiro Futagi ◽  
Yasumitsu Ohta ◽  
Hidenori Mimura ◽  
...  

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