Reactive Scattering of Si2 H6 from the Si(100) Surface

ABSTRACTThe reaction of Si2H6 with the Si(100) surface has been examined via supersonic molecular beam scattering techniques. The effects of incident translational energy, incident angle, mean vibrational energy and surface temperature have been considered explicitly. It is found that the reaction probability is most sensitive tothe incident translational energy, varying nearly linearly with increasing energy. The effect of incident angle θi can be accounted for by an energy scaling law that is given approximately by <Etr>cosnθi, where n ∼ 1.