A Simple Method for Determination of the Elastic Modulus of Thin Films on a Substrate
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Tin Film
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ABSTRACTHigh precision force displacement indenting instruments are now widely used for the determination of the mechanical properties of materials. However, for thin films attached to a substrate, the basis of any analysis of such high precision data is still limited. In this study the force displacement data has been generated using spherically tipped indenters of radii from 5 to 150 μm loaded onto a 2.74 μm thick TiN film on a silicon substrate as well as onto the substrate directly. Data have been generated using two loading procedures, continuous and load partial-unloading, almost entirely within the elastic contact regime. The results are analysed to determine the modulus of the TiN film.
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1999 ◽
Vol 342
(1-2)
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pp. 153-159
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