Improved Methods for Evaluation of Rapid Thermal Processors

MRS Proceedings ◽

10.1557/proc-470-63 ◽

1997 ◽

Vol 470 ◽

Author(s):

Tony Speranza ◽

Jim Nakos ◽

Val Medina ◽

Sanjay Banerjee ◽

Gary Williamson ◽

...

Keyword(s):

Performance Evaluation ◽

Temperature Control ◽

Development Projects ◽

Technology Node ◽

System Characterization ◽

Improved Methods

ABSTRACTSEMATECH has worked with numerous commercial suppliers of RTP systems on both evaluation and development projects. It has adopted standardized methods which minimize monitor wafer impact and improve system characterization. RTP temperature control requirements are projected to tighten with each successive technology node (1). This paper discusses issues concerning performance evaluation of Rapid Thermal Processors (RTP).

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Performance evaluation of CNFET based operational amplifier at technology node beyond 45-nm

2013 Annual IEEE India Conference (INDICON) ◽

10.1109/indcon.2013.6725973 ◽

2013 ◽

Author(s):

Mohd. Ajmal Kafeel ◽

Mohd. Hasan ◽

Mohd. Shah Alam ◽

A. Kumar ◽

S. Prasad ◽

...

Keyword(s):

Performance Evaluation ◽

Operational Amplifier ◽

Technology Node

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PERFORMANCE EVALUATION OF INTERNAL MODEL CONTROL BASED PROPORTIONAL INTEGRAL DERIVATIVE CONTROLLER FOR AVIONICS BAY TEMPERATURE CONTROL

INTERNATIONAL JOURNAL OF ELECTRICAL ENGINEERING AND TECHNOLOGY ◽

10.34218/ijeet.12.9.2021.007 ◽

2021 ◽

Vol 12 (9) ◽

Author(s):

Isaiah Adebayo ◽

Oluwole Adegbola ◽

David Aborisade ◽

Omolola Ajayi

Keyword(s):

Performance Evaluation ◽

Temperature Control ◽

Internal Model ◽

Internal Model Control ◽

Proportional Integral Derivative ◽

Proportional Integral Derivative Controller ◽

Proportional Integral ◽

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Performance Evaluation of Main Steam Temperature Control System of Thermal Power Unit Based on Mahalanobis Distance

2020 5th International Conference on Automation, Control and Robotics Engineering (CACRE) ◽

10.1109/cacre50138.2020.9230075 ◽

2020 ◽

Author(s):

Boyong Hu ◽

Jianbo Xie ◽

Yusheng He ◽

Yinsong Wang ◽

Pingyan Ma

Keyword(s):

Performance Evaluation ◽

Control System ◽

Temperature Control ◽

Mahalanobis Distance ◽

Thermal Power ◽

Temperature Control System ◽

Steam Temperature ◽

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Performance Evaluation System Framework for Natural Disaster Research and Development Projects

Korean Journal of Construction Engineering and Management ◽

10.6106/kjcem.2013.14.4.118 ◽

2013 ◽

Vol 14 (4) ◽

pp. 118-129 ◽

Author(s):

Du-Yon Kim ◽

Sang-Bum Kim ◽

Hyun-Jun Kwak

Keyword(s):

Performance Evaluation ◽

Research And Development ◽

Natural Disaster ◽

Evaluation System ◽

Development Projects ◽

Disaster Research ◽

System Framework ◽

Performance Evaluation System

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Designing of anti-windup feature for internal model controller with real-time performance evaluation on temperature control loop

2019 2nd International Conference on Intelligent Computing, Instrumentation and Control Technologies (ICICICT) ◽

10.1109/icicict46008.2019.8993360 ◽

2019 ◽

Author(s):

Ujjwal Manikya Nath ◽

Chanchal Dey ◽

Rajani K. Mudi

Keyword(s):

Performance Evaluation ◽

Real Time ◽

Temperature Control ◽

Internal Model ◽

Control Loop ◽

Time Performance ◽

Internal Model Controller

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A performance evaluation framework of development projects: An empirical study of Constituency Development Fund (CDF) construction projects in Kenya

International Journal of Project Management ◽

10.1016/j.ijproman.2013.07.005 ◽

2014 ◽

Vol 32 (3) ◽

pp. 492-507 ◽

Author(s):

Christopher Ngacho ◽

Debadyuti Das

Keyword(s):

Performance Evaluation ◽

Empirical Study ◽

Construction Projects ◽

Evaluation Framework ◽

Development Projects ◽

Development Fund ◽

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Tuning and performance evaluation of PID controller for superheater steam temperature control of 200 MW boiler using gain phase assignment algorithm

10.1063/1.5031993 ◽

2018 ◽

Author(s):

A. Yasmine Begum ◽

N. Gireesh

Keyword(s):

Performance Evaluation ◽

Temperature Control ◽

Pid Controller ◽

Steam Temperature ◽

Assignment Algorithm ◽

And Performance

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Performance evaluation of Ultra Wideband printed antenna by system characterization

2012 9th International Conference on Electrical Engineering/Electronics, Computer, Telecommunications and Information Technology ◽

10.1109/ecticon.2012.6254150 ◽

2012 ◽

Author(s):

Adi Mahmud Jaya Marindra ◽

Sathaporn Promwong ◽

Jun-ichi Takada

Keyword(s):

Performance Evaluation ◽

Ultra Wideband ◽

Printed Antenna ◽

System Characterization

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Performance Evaluation of a Guarded Hot Box U-value Measurement Facility under Different Software based Temperature Control Strategies

Energy Procedia ◽

10.1016/j.egypro.2014.07.287 ◽

2014 ◽

Vol 54 ◽

pp. 448-454 ◽

Author(s):

Amrita Ghosh ◽

Supratik Ghosh ◽

Subhasis Neogi

Keyword(s):

Performance Evaluation ◽

Temperature Control ◽

Control Strategies ◽

Measurement Facility ◽

U Value ◽

Value Measurement

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Performance Evaluation of a Temperature Control Stage Used on a Semiconductor Gas Sensor 3D Electro-Thermal Model Through Simulink(r)

Technology and Engineering Applications of Simulink ◽

10.5772/37675 ◽

2012 ◽

Author(s):

E.N. Vzquez-Acosta ◽

S. Mendoza-Acevedo ◽

M.A. Reyes-Barranca ◽

L.M. Flores-Nava ◽

J.A. Moreno-Cadenas ◽

...

Keyword(s):

Performance Evaluation ◽

Temperature Control ◽

Thermal Model ◽

Semiconductor Gas Sensor ◽

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