Residual Oxygen Determination In Silicon Epilayer, Comparison With Ftir Measurements

1997 ◽  
Vol 483 ◽  
Author(s):  
F. Degas ◽  
G. Blondiaux ◽  
B. Pichaud

AbstractFor power devices the use of silicon epilayer on CZ substrate is a solution to make devices with a low oxygen concentration in the active zone. Oxygen is probably one of the most important residual impurities in silicon samples. Usualy the determination of the interstitial oxygen is done by Fourier Transform Infra Red spectroscopy (FTIR). In this work we have determined oxygen by Charged Particle Activation Analysis (CPAA). The main difference between these two techniques is that CPAA gives the total oxygen concentration whereas FTIR gives interstitial oxygen.We have determined the oxygen in 200μm thick silicon epilayer and studied its behavior during thermal treatments. Oxygen concentration is found in the range of 1015/cm3 just after the epitaxial process. After thermal treatment the concentration in the epilayer rose to several 1016/cm3 to 1017/cm3, depending on the treatment. A comparison with FTIR experiment is done and the amount of oxygen precipitate is determined.

2021 ◽  
Vol 560 ◽  
pp. 179-185
Author(s):  
Adiza Abass ◽  
Tokuju Okano ◽  
Kotchakorn Boonyaleka ◽  
Ryo Kinoshita-Daitoku ◽  
Shoji Yamaoka ◽  
...  

1982 ◽  
Vol 92 (1) ◽  
pp. 172 ◽  
Author(s):  
J. H. Hendry ◽  
J. V. Moore ◽  
B. W. Hodgson ◽  
J. P. Keene

2009 ◽  
Vol 69 (1) ◽  
pp. 1-18 ◽  
Author(s):  
LP. Sartori ◽  
MG. Nogueira ◽  
R. Henry ◽  
EM. Moretto

During three consecutive years, monthly samples of zooplankton were taken in the lacustrine (dam) zone of Jurumirim (São Paulo, Brazil). The seasonal effect on basic limnological features (thermal regime, oxygen distribution, phytoplankton biomass, etc.) was also examined. The influence of the seasonality on the fluctuation of the zooplankton composition and abundance was not clearly detected (low degree of recurrent patterns). Rotifers (32 taxa) were the most abundant organisms during almost the entire study period with some seasonal alternations in the maximum abundance peaks of the main taxa (Conochilus unicornis, Keratella americana, K. cochlearis and Hexarthra spp.), except for Polyarthra (mainly P. vulgaris). Only occasionally copepods were numerically dominant. Higher copepod abundance was positively associated to periods of increase in the water retention time. Among the Copepoda (10 taxa) the calanoids (mainly Notodiaptomus iheringi) were more abundant, especially in warmer periods. Conversely, cyclopoids had higher abundance in autumn and winter. The species Thermocyclops minutus and T. decipiens co-occurred, but the first attained higher abundance. Some evidence of co-existence strategies between both species are considered. Cladocera (17 taxa) was never numerically dominant and the main taxa (Bosmina spp., Ceriodaphnia spp. and Diaphanosoma spp.) occurred almost the whole study period and did not present a seasonal pattern of fluctuation. Diaphanosoma (mainly D. birgei) attained the highest abundance among cladocerans. Most organisms were always found at the surface, but they also occupy the whole water column, even in periods of stratified conditions and low oxygen concentration in the bottom layers. Among the main zooplanktonic taxa, only Hexarthra avoids deep layers. An exceptionally high concentration of Copepoda nauplii on the surface was influenced by low transparency, high concentration of phytoplankton at this layer and low oxygen concentration at the bottom. In periods of higher retention timevariability there was a more heterogeneous distribution of the zooplankton in the water column. The increase in the retention time seems also to favor the copepod development. Finally, some inter-decade changes are considered on the basis of zooplankton assemblage structure observations.


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