Roughness Characterization of Si(110) Etched in TMAH by Atomic Force Microscopy

1999 ◽  
Vol 605 ◽  
Author(s):  
Z. Moktadir ◽  
K. Sato ◽  
A. Matsumuro ◽  
K. Kayukawa ◽  
M. Shikida
Keyword(s):  
Atomic Force Microscopy ◽  
Ammonium Hydroxide ◽  
Power Spectrum Density ◽  
Scaling Analysis ◽  
Force Microscopy ◽  
Atomic Force ◽  
Roughness Exponent ◽  
Tetra Methyl Ammonium Hydroxide ◽  
Spectrum Density

AbstractWe have investigated the roughness of a silicon (110)-oriented surface after being etched with 20% TMAH (Tetra-methyl Ammonium Hydroxide). We have used an Atomic Force Microscope to determine the roughness exponent α using three different methods: fractal, power spectrum density and scaling analysis. The value of the parameter α was identified to be close to 1/2. This value is different from the KPZ value, which is 0.4 in 2+1 dimension

Scaling Analysis of a- and poly-Si Surface Roughness by Atomic Force Microscopy

1994 ◽  
Vol 367 ◽  
Author(s):  
T. Yoshinobu ◽  
A. Iwamoto ◽  
K. Sudoh ◽  
H. Iwasaki
Keyword(s):  
Surface Roughness ◽  
Atomic Force Microscopy ◽  
Surface Area ◽  
Scaling Behavior ◽  
Linear Size ◽  
Scaling Analysis ◽  
Macroscopic Scale ◽  
Force Microscopy ◽  
Atomic Force ◽  
Roughness Exponent

AbstractThe scaling behavior of the surface roughness of a-and poly-Si deposited on Si was investigated by atomic force microscopy (AFM). The interface width W(L), defined as the rms roughness as a function of the linear size of the surface area, was calculated from various sizes of AFM images. W(L) increased as a power of L with the roughness exponent ∝ on shorter length scales, and saturated at a constant value of on a macroscopic scale. The value of roughness exponent a was 0.48 and 0.90 for a-and poly-Si, respectively, and σ was 1.5 and 13.6nm for 350nm-thick a-Si and 500nm-thick poly-Si, respectively. The AFM images were compared with the surfaces generated by simulation.

A COMPARISON BETWEEN THE ATOMIC FORCE MICROSCOPY AND X-RAY REFLECTIVITY ON THE CHARACTERIZATION OF SURFACE ROUGHNESS

2003 ◽  
Vol 02 (04n05) ◽  
pp. 343-348 ◽  
Author(s):  
CHIH-HAO LEE ◽  
WEN-YEN PEN ◽  
MING-ZHE LIN ◽  
KUAN-LI YU ◽  
JEN-CHUNG HSUEH
Keyword(s):  
Surface Roughness ◽  
Atomic Force Microscopy ◽  
Surface Morphology ◽  
Power Spectra ◽  
X Ray ◽  
Force Microscopy ◽  
Atomic Force ◽  
Roughness Exponent ◽  
Buried Layer

Atomic force microscopy and X-ray reflectivity methods are used to characterize a surface morphology which includes the information of rms roughness, roughness exponent, and the height–height correlation length. Two major reasons to interpret the discrepancy of rms roughness data measured by AFM and X-ray reflectivity are (1) the bandpass of power spectra density is different and (2) the X-ray reflectivity probes the high density buried layer.

Stereometric characterization of Dinizia excelsa Ducke wood from Amazon rainforest using atomic force microscopy

2021 ◽  
Author(s):  
Willian Silva Conceição ◽  
Ştefan Ţălu ◽  
Robert Saraiva Matos ◽  
Glenda Quaresma Ramos ◽  
Fidel Guereiro Zayas ◽  
...  
Keyword(s):  
Atomic Force Microscopy ◽  
Amazon Rainforest ◽  
Force Microscopy ◽  
Atomic Force ◽  
Dinizia Excelsa

Characterization of mitochondria isolated from normal and ischemic hearts in rats utilizing atomic force microscopy

Micron ◽  
2011 ◽  
Vol 42 (3) ◽  
pp. 299-304 ◽  
Author(s):  
Gi-Ja Lee ◽  
Su-Jin Chae ◽  
Jae Hoon Jeong ◽  
So-Ra Lee ◽  
Sang-Jin Ha ◽  
...  
Keyword(s):  
Atomic Force Microscopy ◽  
Force Microscopy ◽  
Atomic Force

Characterization of carbon films microstructure by atomic force microscopy and Raman spectroscopy

1994 ◽  
Vol 76 (6) ◽  
pp. 3443-3447 ◽  
Author(s):  
J. M. Yáñez‐Limón ◽  
F. Ruiz ◽  
J. González‐Hernández ◽  
C. Vázquez‐López ◽  
E. López‐Cruz
Keyword(s):  
Raman Spectroscopy ◽  
Atomic Force Microscopy ◽  
Carbon Films ◽  
Force Microscopy ◽  
Atomic Force

Characterization of Batch-Microfabricated Scanning Electrochemical-Atomic Force Microscopy Probes

2005 ◽  
Vol 77 (2) ◽  
pp. 424-434 ◽  
Author(s):  
Phillip S. Dobson ◽  
John M. R. Weaver ◽  
Mark N. Holder ◽  
Patrick R. Unwin ◽  
Julie V. Macpherson
Keyword(s):  
Atomic Force Microscopy ◽  
Force Microscopy ◽  
Atomic Force
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