Optically-Induced, Room-Temperature Oxidation of Gallium Arsenide
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AbstractRoom-temperature, optically-induced oxidation of the gallium arsenide surface has been studied with laser radiation of different wavelengths. It was found that deep-ultraviolet light is much more effective in enhancing oxidation than near-ultraviolet or visible light. The growth rate of the oxide was also found to be drastically increased by the presence of chemisorbed water molecules on the surface.
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1988 ◽
Vol 53
(12)
◽
pp. 2995-3013
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Keyword(s):
2021 ◽
Vol 156
◽
pp. 110132