Electron Bean Induced Defects in Silicon/Indium Oxide Heterojunctions and Interfacial Reactions During Annealing
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ABSTRACTSi/In203 diodes have been prepared by e-beam evaporation of In203 tablets. Annealing of these devices was carried out in N2 and H2 /N2 mixture at 1 atm. in the temperature range of 400–800°C. Experimental data indicated a large increase in the Schottky barrier height and growth of interfacial oxide during annealing. The interface state density was reduced by a factor of 2, but the results indicated the increase in the barrier height to be mainly due to reduction of positive fixed charge density.
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2010 ◽
Vol 12
(5)
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pp. 706-711
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Keyword(s):
2010 ◽
Vol 42
(6-7)
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pp. 1257-1260
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2001 ◽
Vol 82-84
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pp. 255-258
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2007 ◽
Vol 14
(04)
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pp. 765-768
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Hydrostatic pressure dependence of interface state density of Cd/n-type GaAs Schottky barrier diodes
2010 ◽
Vol 405
(1)
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pp. 287-290
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