scholarly journals Influence of zirconium addition on microstructure, hardness and oxidation resistance of tantalum nitride thin films

2021 ◽  
Vol 26 (4) ◽  
Author(s):  
Jonh Yago Erikson Santos ◽  
André Romão Terto ◽  
Daniel Angel Ramirez ◽  
Júlio César Valeriano dos Santos ◽  
Beatriz dos Santos Silva Brito ◽  
...  
Keyword(s):  
Thin Films ◽  
Oxidation Resistance ◽  
Tantalum Nitride ◽  
Zirconium Addition

scholarly journals Ultra-high oxidation resistance of nano-structured thin films

2021 ◽  
Vol 201 ◽  
pp. 109499
Author(s):  
E. Aschauer ◽  
T. Wojcik ◽  
P. Polcik ◽  
O. Hunold ◽  
M. Arndt ◽  
...  
Keyword(s):  
Thin Films ◽  
Oxidation Resistance ◽  
High Oxidation ◽  
High Oxidation Resistance

scholarly journals Improving phase stability, hardness, and oxidation resistance of reactively magnetron sputtered (Al,Cr,Nb,ta,Ti)N thin films by Si-alloying

2021 ◽  
pp. 127162
Author(s):  
Andreas Kretschmer ◽  
Alexander Kirnbauer ◽  
Vincent Moraes ◽  
Daniel Primetzhofer ◽  
Kumar Yalamanchili ◽  
...  
Keyword(s):  
Thin Films ◽  
Oxidation Resistance ◽  
Phase Stability

The impact of substrate properties and thermal annealing on tantalum nitride thin films

2012 ◽  
Vol 258 (7) ◽  
pp. 2894-2900 ◽  
Author(s):  
M. Grosser ◽  
M. Münch ◽  
H. Seidel ◽  
C. Bienert ◽  
A. Roosen ◽  
...  
Keyword(s):  
Thin Films ◽  
Thermal Annealing ◽  
Tantalum Nitride ◽  
Substrate Properties ◽  
The Impact

MOCVD of tantalum nitride thin films from TBTEMT single source precursor as metal electrodes in CMOS applications

2007 ◽  
Vol 201 (22-23) ◽  
pp. 9154-9158 ◽  
Author(s):  
M. Lemberger ◽  
S. Thiemann ◽  
A. Baunemann ◽  
H. Parala ◽  
R.A. Fischer ◽  
...  
Keyword(s):  
Thin Films ◽  
Tantalum Nitride ◽  
Single Source ◽  
Metal Electrodes ◽  
Single Source Precursor

Influences of aluminum doping on the microstructures and electrical properties of tantalum nitride thin films before and after annealing

Vacuum ◽  
2021 ◽  
pp. 110791
Author(s):  
Kao-Yuan Wang ◽  
Ting-Chang Chang ◽  
Wen-Chung Chen ◽  
Yong-Ci Zhang ◽  
Yi-Ting Tseng ◽  
...  
Keyword(s):  
Thin Films ◽  
Electrical Properties ◽  
Tantalum Nitride ◽  
Aluminum Doping ◽  
Before And After

Influence of Si-addition on wear and oxidation resistance of TiWSixN thin films

2019 ◽  
Vol 45 (14) ◽  
pp. 17363-17375
Author(s):  
H.A. Macías ◽  
L. Yate ◽  
L.E. Coy ◽  
W. Aperador ◽  
J.J. Olaya
Keyword(s):  
Thin Films ◽  
Oxidation Resistance ◽  
Si Addition

Thermomechanical properties and oxidation resistance of Ce–Si alloyed Ti–Al–N thin films

Vacuum ◽  
2019 ◽  
Vol 166 ◽  
pp. 231-238
Author(s):  
H. Asanuma ◽  
F.F. Klimashin ◽  
P. Polcik ◽  
S. Kolozsvari ◽  
H. Riedl ◽  
...  
Keyword(s):  
Thin Films ◽  
Oxidation Resistance ◽  
Thermomechanical Properties
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