AN INVESTIGATION OF CONCENTRATION OVERPOTENTIAL OF PEFCs BY MEANS OF MEMS-TECHNOLOGY BASED HIGHLY-ORDERED GDL

Equipment ◽  
2006 ◽  
Author(s):  
K. Fushinobu ◽  
D. Takahashi ◽  
T. Miura ◽  
Ken Okazaki
Keyword(s):  
Mems Technology

Development of a High-Throughput DNA Fiber Analysis Device Using MEMS Technology

2013 ◽  
Vol 133 (5) ◽  
pp. 139-146
Author(s):  
Takaaki Suzuki ◽  
Kyohei Terao ◽  
Hiroyuki Suzuki ◽  
Yuki Nitta ◽  
Hidekuni Takao ◽  
...  
Keyword(s):  
High Throughput ◽  
Fiber Analysis ◽  
Mems Technology

Design and Fabrication of an SU-8 Biomimetic Flapping-wing Micro Air Vehicle by MEMS Technology

ROBOT ◽  
2011 ◽  
Vol 33 (3) ◽  
pp. 366-370 ◽  
Author(s):  
Pengcheng CHI ◽  
Weiping ZHANG ◽  
Wenyuan CHEN ◽  
Hongyi LI ◽  
Kun MENG ◽  
...  
Keyword(s):  
Flapping Wing ◽  
Micro Air Vehicle ◽  
Air Vehicle ◽  
Mems Technology

scholarly journals Dynamic Modeling and Anti-Disturbing Control of an Electromagnetic MEMS Torsional Micromirror Considering External Vibrations in Vehicular LiDAR

Micromachines ◽  
2021 ◽  
Vol 12 (1) ◽  
pp. 69
Author(s):  
Yong Hua ◽  
Shuangyuan Wang ◽  
Bingchu Li ◽  
Guozhen Bai ◽  
Pengju Zhang
Keyword(s):  
Dynamic Model ◽  
Optical Switching ◽  
Control Method ◽  
Sliding Mode ◽  
Algorithm Design ◽  
Coupling Model ◽  
Micro Electro Mechanical Systems ◽  
Mems Technology ◽  
Torsional Micromirror ◽  
Dynamic Coupling Model

Micromirrors based on micro-electro-mechanical systems (MEMS) technology are widely employed in different areas, such as optical switching and medical scan imaging. As the key component of MEMS LiDAR, electromagnetic MEMS torsional micromirrors have the advantages of small size, a simple structure, and low energy consumption. However, MEMS micromirrors face severe disturbances due to vehicular vibrations in realistic use situations. The paper deals with the precise motion control of MEMS micromirrors, considering external vibration. A dynamic model of MEMS micromirrors, considering the coupling between vibration and torsion, is proposed. The coefficients in the dynamic model were identified using the experimental method. A feedforward sliding mode control method (FSMC) is proposed in this paper. By establishing the dynamic coupling model of electromagnetic MEMS torsional micromirrors, the proposed FSMC is evaluated considering external vibrations, and compared with conventional proportion-integral-derivative (PID) controls in terms of robustness and accuracy. The simulation experiment results indicate that the FSMC controller has certain advantages over a PID controller. This paper revealed the coupling dynamic of MEMS micromirrors, which could be used for a dynamic analysis and a control algorithm design for MEMS micromirrors.

scholarly journals Miniaturization of Respiratory Measurement System in Artificial Ventilator for Small Animal Experiments to Reduce Dead Space and Its Application to Lung Elasticity Evaluation

Sensors ◽  
2021 ◽  
Vol 21 (15) ◽  
pp. 5123
Author(s):  
Homare Yoshida ◽  
Yoshihiro Hasegawa ◽  
Miyoko Matsushima ◽  
Tomoshi Sugiyama ◽  
Tsutomu Kawabe ◽  
...  
Keyword(s):  
Respiratory System ◽  
Measurement System ◽  
Dead Space ◽  
Animal Experiments ◽  
Small Animal ◽  
Silicone Resin ◽  
Directional Detection ◽  
Mems Technology ◽  
Respiratory Measurement ◽  
Static Conditions

A respiratory measurement system composed of pressure and airflow sensors was introduced to precisely control the respiratory condition during animal experiments. The flow sensor was a hot-wire thermal airflow meter with a directional detection and airflow temperature change compensation function based on MEMS technology, and the pressure sensor was a commercially available one also produced by MEMS. The artificial dead space in the system was minimized to the value of 0.11 mL by integrating the two sensors on the same plate (26.0 mm × 15.0 mm). A balloon made of a silicone resin with a hardness of A30 was utilized as the simulated lung system and applied to the elasticity evaluation of the respiratory system in a living rat. The inside of the respiratory system was normally pressurized without damage, and we confirmed that the developed system was able to evaluate the elasticity of the lung tissue in the rat by using the pressure value obtained at the quasi-static conditions in the case of the ventilation in the animal experiments.

scholarly journals Ultrafine Aerosol Particle Sizer Based on Piezoresistive Microcantilever Resonators with Integrated Air-Flow Channel

Sensors ◽  
2021 ◽  
Vol 21 (11) ◽  
pp. 3731
Author(s):  
Maik Bertke ◽  
Ina Kirsch ◽  
Erik Uhde ◽  
Erwin Peiner
Keyword(s):  
Mass Concentration ◽  
Limit Of Detection ◽  
A Priori ◽  
Micro Electro Mechanical System ◽  
Single Chip ◽  
Air Stream ◽  
Mems Technology ◽  
Clean Air ◽  
Particle Sizer ◽  
Ultrafine Aerosol

To monitor airborne nano-sized particles (NPs), a single-chip differential mobility particle sizer (DMPS) based on resonant micro cantilevers in defined micro-fluidic channels (µFCs) is introduced. A size bin of the positive-charged fraction of particles herein is separated from the air stream by aligning their trajectories onto the cantilever under the action of a perpendicular electrostatic field of variable strength. We use previously described µFCs and piezoresistive micro cantilevers (PMCs) of 16 ng mass fabricated using micro electro mechanical system (MEMS) technology, which offer a limit of detection of captured particle mass of 0.26 pg and a minimum detectable particulate mass concentration in air of 0.75 µg/m3. Mobility sizing in 4 bins of a nebulized carbon aerosol NPs is demonstrated based on finite element modelling (FEM) combined with a-priori knowledge of particle charge state. Good agreement of better than 14% of mass concentration is observed in a chamber test for the novel MEMS-DMPS vs. a simultaneously operated standard fast mobility particle sizer (FMPS) as reference instrument. Refreshing of polluted cantilevers is feasible without de-mounting the sensor chip from its package by multiply purging them alternately in acetone steam and clean air.

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