Board 29: Creating a Virtual Reality Simulation of Plasma Etcher to Facilitate Teaching and Practice of Dry Etching in Nanotechnology Education
1999 ◽
Keyword(s):
Keyword(s):
2014 ◽
Vol 10
(5)
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pp. 603-618
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Keyword(s):
2006 ◽
Vol 113
(12)
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pp. 1382-1387
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2020 ◽
pp. 1768-1768