P-10: Mechanism of Lowering Contact Resistance between Transparent Conducting Oxide Layer and Mo/Al/Mo Layer in TFT-LCDs

Chang-Oh Jeong; Yang-Ho Bae; Beom-Seok Cho; Je-Hun Lee; Min-Seok Oh; Sung-Lak Choi; Seong-Yong Hwang; Kyung-Lae Roh; Shi-Yul Kim; Soon-Kwon Lim; Jun-Hyung Seok

doi:10.1889/1.2036419

P-10: Mechanism of Lowering Contact Resistance between Transparent Conducting Oxide Layer and Mo/Al/Mo Layer in TFT-LCDs

SID Symposium Digest of Technical Papers ◽

10.1889/1.2036419 ◽

2005 ◽

Vol 36 (1) ◽

pp. 261

Author(s):

Chang-Oh Jeong ◽

Yang-Ho Bae ◽

Beom-Seok Cho ◽

Je-Hun Lee ◽

Min-Seok Oh ◽

...

Keyword(s):

Contact Resistance ◽

Oxide Layer ◽

Transparent Conducting Oxide ◽

Transparent Conducting

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Improved efficiency of Cu(In,Ga)Se 2 mini‐module via high‐mobility In 2 O 3 :W,H transparent conducting oxide layer

Progress in Photovoltaics Research and Applications ◽

10.1002/pip.3123 ◽

2019 ◽

Vol 27 (6) ◽

pp. 491-500 ◽

Cited By ~ 3

Author(s):

Takashi Koida ◽

Jiro Nishinaga ◽

Yuko Ueno ◽

Hirofumi Higuchi ◽

Hideki Takahashi ◽

...

Keyword(s):

Oxide Layer ◽

Transparent Conducting Oxide ◽

High Mobility ◽

Transparent Conducting

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Fabrication of nano-hole array patterns on transparent conducting oxide layer using thermally curable nanoimprint lithography

Microelectronic Engineering ◽

10.1016/j.mee.2007.12.078 ◽

2008 ◽

Vol 85 (5-6) ◽

pp. 830-833 ◽

Cited By ~ 9

Author(s):

Kyeong-Jae Byeon ◽

Seon-Yong Hwang ◽

Heon Lee

Keyword(s):

Oxide Layer ◽

Nanoimprint Lithography ◽

Transparent Conducting Oxide ◽

Hole Array ◽

Transparent Conducting

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Modeling and control of Transparent Conducting Oxide layer surface morphology for improved light trapping

Chemical Engineering Science ◽

10.1016/j.ces.2012.02.030 ◽

2012 ◽

Vol 74 ◽

pp. 135-147 ◽

Cited By ~ 7

Author(s):

Jianqiao Huang ◽

Gerassimos Orkoulas ◽

Panagiotis D. Christofides

Keyword(s):

Surface Morphology ◽

Oxide Layer ◽

Light Trapping ◽

Transparent Conducting Oxide ◽

Layer Surface ◽

Modeling And Control ◽

Transparent Conducting ◽

And Control

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Evaluation of different intrinsic ZnO and transparent conducting oxide layer combinations in Cu(In,Ga)Se 2 solar cells

Thin Solid Films ◽

10.1016/j.tsf.2016.09.015 ◽

2017 ◽

Vol 633 ◽

pp. 235-238 ◽

Cited By ~ 1

Author(s):

Fredrik Larsson ◽

Jan Keller ◽

Marika Edoff ◽

Tobias Törndahl

Keyword(s):

Solar Cells ◽

Oxide Layer ◽

Transparent Conducting Oxide ◽

Transparent Conducting

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Advantages of using amorphous IZO films for the transparent conducting oxide layer in Cu(In, Ga)Se2 solar cells

2011 37th IEEE Photovoltaic Specialists Conference ◽

10.1109/pvsc.2011.6186520 ◽

2011 ◽

Author(s):

Y. Matsumoto ◽

M. Warasawa ◽

A. Kaijo ◽

M. Sugiyama

Keyword(s):

Solar Cells ◽

Oxide Layer ◽

Transparent Conducting Oxide ◽

Transparent Conducting

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Transparent Conducting Oxide Layer By Thermal Evaporation for Cu(In,Ga)Se2 Solar Cell with Chemical Bath Deposited-ZnS Buffer Layer

ECS Meeting Abstracts ◽

10.1149/ma2016-02/15/1421 ◽

2016 ◽

Keyword(s):

Solar Cell ◽

Oxide Layer ◽

Buffer Layer ◽

Thermal Evaporation ◽

Transparent Conducting Oxide ◽

Transparent Conducting

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Influence of growth temperature of transparent conducting oxide layer on Cu(In,Ga)Se2 thin-film solar cells

Thin Solid Films ◽

10.1016/j.tsf.2011.08.083 ◽

2012 ◽

Vol 520 (6) ◽

pp. 2115-2118 ◽

Cited By ~ 30

Author(s):

Dae-Hyung Cho ◽

Yong-Duck Chung ◽

Kyu-Seok Lee ◽

Nae-Man Park ◽

Kyung-Hyun Kim ◽

...

Keyword(s):

Thin Film ◽

Solar Cells ◽

Oxide Layer ◽

Growth Temperature ◽

Transparent Conducting Oxide ◽

Thin Film Solar Cells ◽

Transparent Conducting

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Effects of in situ plasma treatment on optical and electrical properties of index-matched transparent conducting oxide layer

Applied Surface Science ◽

10.1016/j.apsusc.2010.05.014 ◽

2010 ◽

Vol 256 (23) ◽

pp. 6997-7000 ◽

Cited By ~ 3

Author(s):

Yong Hwan Lim ◽

Hana Yoo ◽

Bum Ho Choi ◽

Young Baek Kim ◽

Jong Ho Lee ◽

...

Keyword(s):

Electrical Properties ◽

Plasma Treatment ◽

Oxide Layer ◽

Transparent Conducting Oxide ◽

Optical And Electrical Properties ◽

Transparent Conducting

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Effective utilization of light by transparent conducting oxide layer to enhance the performance of the silicon heterojunction solar cells

Bulletin of Materials Science ◽

10.1007/s12034-021-02534-y ◽

2021 ◽

Vol 44 (3) ◽

Author(s):

Venkanna Kanneboina

Keyword(s):

Solar Cells ◽

Oxide Layer ◽

Transparent Conducting Oxide ◽

Effective Utilization ◽

Heterojunction Solar Cells ◽

Transparent Conducting ◽

Silicon Heterojunction Solar Cells

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Backside FIB Device Modifications Through the BOX Layer of an SOI Device

ISTFA 2002: Conference Proceedings from the 28th International Symposium for Testing and Failure Analysis ◽

10.31399/asm.cp.istfa2002p0403 ◽

2002 ◽

Author(s):

Jeffery P. Huynh ◽

Joseph P. Shannon ◽

Richard W. Johnson ◽

Mike Santana ◽

Thomas Y. Chu ◽

...

Keyword(s):

Contact Resistance ◽

Oxide Layer ◽

Cross Section ◽

Test Structure ◽

Ring Oscillator ◽

Oscillator Circuit ◽

Entire Process ◽

Oscillator Frequency ◽

Polysilicon Gate ◽

Resistance Data

Abstract Modifications directly to a transistor’s source/drain and polysilicon gate through the backside of a SOI device were made. Contact resistance data was obtained by creating contacts through the buried oxide layer of a manufactured test structure. A ring oscillator circuit was modified and the shift in oscillator frequency was measured. Finally, cross section images of the FIB created contacts were presented in the paper to illustrate the entire process.

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