AbstractX-ray fluorescence spectrometry (XRF) is a powerful tool for the analysis of solid material. That is the reason why the technique was applied for the determination of rare earth elements (REEs) since about 1970. At present, energy-dispersive XRF and wavelength-dispersive XRF are used for the analysis of pressed powder pellets or fused Li-borate beads containing REEs. The production of reliable results can only be achieved by careful optimization of the parameter, in particular the selection of spectral lines. The quantification is based on a calibration realized by using reference samples.