Three Dimensionally Interconnected Silicon Nanomembranes for Optical Phased Array (OPA) and Optical True Time Delay (TTD) Applications
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2000 ◽
Vol 12
(8)
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pp. 1049-1051
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2010 ◽
pp. 241-248
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2004 ◽
Vol 15
(4)
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pp. 385-390
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1995 ◽
Vol 13
(8)
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pp. 1663-1678
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