Magnetic sector SIMS system for advanced analytical capabilities on FIB instruments

2021 ◽  
Author(s):  
Jean-Nicolas AUDINOT ◽  
Keyword(s):  
Author(s):  
H.T. Pearce-Percy

Recently an energy analyser of the uniform magnetic sector type has been installd in a 100KV microscope. This microscope can be used in the STEM mode. The sector is of conventional design (Fig. 1). The bending angle was chosen to be 90° for ease of construction. The bending radius (ρ) is 20 cm. and the object and image distances are 42.5 cm. and 30.0 cm. respectively.


1959 ◽  
Vol 14 (9) ◽  
pp. 822-827 ◽  
Author(s):  
H. A. Tasman ◽  
A. J. H. Boerboom ◽  
H. Wachsmuth

In previous papers 1.2we presented the radial second order imaging properties of inhomogeneous magnetic sector fields with normal incidence and exit at plane boundaries. These fields may provide very high mass resolving power and mass dispersion without increase in radius or decrease of slit widths. In the present paper the calculations are extended to include the effect of oblique incidence and exit at curved boundaries. The influence of the fringing fields on axial focusing when the boundaries are oblique, is accounted for. It is shown that the second order angular aberration may Le eliminated by appropriate curvature of the boundaries.


2002 ◽  
Vol 17 (2) ◽  
pp. 131-134 ◽  
Author(s):  
R. Steve Pappas ◽  
Bill G. Ting ◽  
Jefferey M. Jarrett ◽  
Dan C. Paschal ◽  
Samuel P. Caudill ◽  
...  

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