Hybrid integrated modeling of thermal field temperature in Cz silicon single crystal growth process based on VMD-CNN-LSTM-ELM

Author(s):  
Yin Wan ◽  
Ding Liu ◽  
Junchao Ren
2012 ◽  
Vol 7 (2) ◽  
pp. 379-386 ◽  
Author(s):  
Yoshio MASUDA ◽  
Akira SUZUKI ◽  
Tohru ISHIGURO ◽  
Chiaki YOKOYAMA

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