Hybrid integrated modeling of thermal field temperature in Cz silicon single crystal growth process based on VMD-CNN-LSTM-ELM
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2019 ◽
Vol 519
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pp. 7-13
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2010 ◽
Vol 53
(5-6)
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pp. 940-943
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Vol 7
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pp. 379-386
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2002 ◽
Vol 149
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pp. 359-371
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2018 ◽
Vol 355
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pp. 012003
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