Modeling and application of Czochralski silicon single crystal growth process using hybrid model of data-driven and mechanism-based methodologies
2021 ◽
2010 ◽
Vol 53
(5-6)
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pp. 940-943
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Keyword(s):
2012 ◽
Vol 7
(2)
◽
pp. 379-386
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Keyword(s):
2002 ◽
Vol 149
(1)
◽
pp. 359-371
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