Modeling and application of Czochralski silicon single crystal growth process using hybrid model of data-driven and mechanism-based methodologies

2021 ◽  
Vol 104 ◽  
pp. 74-85
Author(s):  
Jun-Chao Ren ◽  
Ding Liu ◽  
Yin Wan
2012 ◽  
Vol 7 (2) ◽  
pp. 379-386 ◽  
Author(s):  
Yoshio MASUDA ◽  
Akira SUZUKI ◽  
Tohru ISHIGURO ◽  
Chiaki YOKOYAMA

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