Adaptive optics is being explored actively for several applications such as wavefront correction in biomedical imaging (retinal surgery), variable focal length lenses, and adaptive zoom micromirrors. Diaphragm micromirrors have several advantages such as continuity in image and ease of fabrication. This paper investigates, for the first time to the best of our knowledge, fabrication of diaphragm micromirror using a recently proposed novel process of ‘Bulk Lithography’. In contrast to classical microstereolithography (MSL) processes of 3D layer-by-layer micro fabrication, bulk lithography fabrication is done by scanning of laser beam over the photopolymer resin of unconstraint depth in a single layer scan. The process has capability to fabricate smoothly varying thickness diaphragms for micromirrors. However, as a first step, this paper demonstrates fabrication of uniform thickness micromirrors coated with aluminum. Micromirrors are fabricated with air trapped beneath them which contributes to enhanced stiffness and low damping. Further fabricated micromirror is characterized using laser doppler vibrometer.
