Measurement of the Absolute Optical Thickness Distribution of a Mask-blank Glass by a Phase-shifting, Wavelength Tuning Interferometry
2010 ◽
Vol 76
(2)
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pp. 243-248
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2017 ◽
Vol 48
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pp. 347-351
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Keyword(s):
2013 ◽
Vol 40
(10)
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pp. 1008007
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2013 ◽
Vol 51
(10)
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pp. 1173-1178
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Keyword(s):
Keyword(s):