Simultaneous interferometric measurement of the absolute thickness and surface shape of a transparent plate using wavelength tuning Fourier analysis and phase shifting

2017 ◽  
Vol 48 ◽  
pp. 347-351 ◽  
Author(s):  
Yangjin Kim ◽  
Kenichi Hibino ◽  
Toru Kizaki ◽  
Naohiko Sugita ◽  
Mamoru Mitsuishi
2020 ◽  
Vol 10 (9) ◽  
pp. 3250
Author(s):  
Fuqing Miao ◽  
Seokyoung Ahn ◽  
Yangjin Kim

In wavelength-tuning interferometry, the surface profile of the optical component is a key evaluation index. However, the systematic errors caused by the coupling error between the higher harmonics and phase shift error are considerable. In this research, a new 10N − 9 phase-shifting algorithm comprising a new polynomial window function and a DFT is developed. A new polynomial window function is developed based on characteristic polynomial theory. The characteristic of the new 10N − 9 algorithm is represented in the frequency domain by Fourier description. The phase error of the new algorithm is also discussed and compared with other phase-shifting algorithms. The surface profile of a silicon wafer was measured by using the 10N − 9 algorithm and a wavelength-tuning interferometer. The repeatability measurement error across 20 experiments was 2.045 nm, which indicates that the new 10N − 9 algorithm outperforms the conventional phase-shifting algorithm.


2016 ◽  
Vol 55 (23) ◽  
pp. 6464
Author(s):  
Yangjin Kim ◽  
Kenichi Hibino ◽  
Naohiko Sugita ◽  
Mamoru Mitsuishi

2010 ◽  
Vol 76 (2) ◽  
pp. 243-248
Author(s):  
Yangjin KIM ◽  
Kenichi HIBINO ◽  
Youichi BITOU ◽  
Sonko OSAWA ◽  
Naohiko SUGITA ◽  
...  

Author(s):  
Michael A. Vaudrey ◽  
William R. Saunders ◽  
Bryan Eisenhower

Feedback control system design, for general single-in-single-out (SISO) applications, requires accurate knowledge of the loop transfer function. Active combustion control design is usually implemented using such SISO architectures, but is quite challenging because the thermoacoustic response results from a relatively unknown, self-excited system and nonlinear processes that must be understood before learning the gain/phase relationship of the system precisely at the instability frequency. However, recent experiments have shown that it is possible to obtain accurate measurements of the relevant loop transfer (frequency response) functions at frequencies adjacent to the instability frequency. Using a simple tube combustor, operating with a premixed, gaseous, burner-stabilized flame, the loop frequency response measurements have been used to develop a methodology that leads to ‘test-based predictions’ of the absolute phase settings and ‘best’ gain settings for a proportional, phase-shifting controller commanding an acoustic actuator in the combustor. The contributions of this methodology are twofold. First, it means that a manual search for the required phase setting of the controller is no longer necessary. In fact, this technique allows the absolute value of controller phase to be determined without running the controller. To the authors’ knowledge, this has not been previously reported in the literature. In addition, the ‘best’ gain setting of the controller, based on this new design approach, can be defined as one that eliminates or reduces the limit cycle amplitude as much as possible within the constraint of avoiding generation of any controller-induced instabilities. (This refers to the generation of ‘new’ peaks in the controlled acoustic pressure spectrum.) It is shown that this tradeoff in limit cycle suppression and avoidance of controller-induced instabilities is a manifestation of the well-known tradeoff in the sensitivity/complementary sensitivity function for feedback control solutions. The focus of this article is limited to the presentation of the design method and does not discuss the detailed nonlinear phenomena that must be understood to determine the optimal gain/phase settings at the limit cycle frequency for a real (versus theoretical) combustor system. A companion paper describes how the proposed design method can be used to generate an AI controller that maintains stabilizing control for a range of changing operating conditions.


2013 ◽  
Vol 40 (10) ◽  
pp. 1008007 ◽  
Author(s):  
刘勇 Liu Yong ◽  
刘旭 Liu Xu ◽  
任寰 Ren Huan ◽  
姜宏振 Jiang Hongzhen ◽  
杨一 Yang Yi ◽  
...  

2013 ◽  
Vol 21 (5) ◽  
pp. 1116-1121
Author(s):  
赵智亮 ZHAO Zhi-liang ◽  
夏伯才 XIA Bo-cai ◽  
陈立华 CHEN Li-hua ◽  
张志华 ZHANG Zhi-hua ◽  
郑万国 ZHENG Wan-guo

Sign in / Sign up

Export Citation Format

Share Document